A Novel Process for Reactive Laser Machining of Chemical Vapor-Deposited Diamond Ceramic
A Novel Process for Reactive Laser Machining of Chemical Vapor-Deposited Diamond Ceramic
批准号:
9634856
负责人:
Ajay Malshe
金额:
$22.56万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1997
资助国家:
美国
项目状态:
已结题
起止时间:
1997-08-15 至 2000-07-31
中文摘要
激光诱导加工是一种极好的替代离子束的方法,具有明显的优点,包括通过直接书写或光学投影而无需接触掩模,更高的蚀刻速率和增强的表面完整性。本项目研究用电子束或激光束取代离子束。该研究项目将通过(1)在各种液体介质中进行纳秒(ns)激光化学气相沉积(CVD)金刚石抛光和钻孔实验,以及(2)在液体介质中进行激光与金刚石相互作用的实验诊断和理论建模,来发展对激光辅助和液体诱导反应加工技术的基本理解。
英文摘要
Laser-induced machining is an excellent alternative to ion beams with distinct benefits including patterning by direct writing or optical projection without contact masks, higher etch rates, and enhanced surface integrity. This project investigates a substitution of ion beam with an electron beam or a laser beam. This research project will develop a fundamental understanding of laser-assisted and liquid-induced reactive machining technique by (1) performing nanosecond (ns)-laser chemical vapor-deposited(CVD)-diamond polishing and drilling experiments in various liquid media, and (2) by experimental diagnosis and theoretical modeling of laser : diamond interaction in liquid media.
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