SBIR Phase I: Micromachined Microchannel Plate X-Ray Detector

9861488 这个小型企业创新研究第一阶段项目将进行研究，开发一种用于100 eV 20 KeV X射线的高速成像X射线探测器。 它将采用一种新的硅/金刚石膜为基础的微通道板（MCP），连同在原位X射线光电阴极。 硅晶片被微机械加工以形成具有高空间精度的高纵横比微通道板。 掺杂的金刚石膜激活，可能在硅上，但不是玻璃MCP，提供了一个受控的剥离电阻和非常长的寿命的二次发射表面。 由于硅和金刚石的高温能力，用于掠入射的X射线光电阴极可以直接沉积在MCP表面上。 这导致与现有的成像X射线检测器相比具有长寿命、高抗辐射性、高空间和时间分辨率、低缺陷、高温操作和高X射线检测效率的紧凑的成像X射线检测器。 硅/金刚石微通道板（N4 CP）X射线探测器将在医学成像、X射线检查和科学仪器中产生新的应用，特别是在高速下，具有全电子图像读出功能。 它的成本可能与低性能的玻璃MCP非常有竞争力。

9861488 This Small Business Innovation Research Phase I project will conduct research to develop a high speed imaging x-ray detector for x-rays from 100 eV 20 KeV. It will employ a novel silicon/diamond film based microchannel plate (MCP), together with in situ x-ray photocathodes. Silicon wafers are micromachined to form high aspect ratio microchannel plates with photolithographic spatial precision. The doped diamond film activation, possible on silicon, but not glass MCP, provides a controlled strip resistance and very long-lived secondary emission surface. Because of the high temperature capabilities of the silicon and diamond, x-ray photocathodes for grazing incidence may be directly deposited on the MCP surface. This leads to a compact imaging x-ray detector with long life, high radiation resistance, high spatial and temporal resolution, low defects, high temperature operation, and high x-ray detection efficiency compared with existing imaging x-ray detectors. The silicon/diamond Microchannel Plate (N4CP) X-ray Detector will lead to new applications in medical imaging, x-ray inspection and scientific instrumentation, especially at high speeds, with full electronic image readout. Its cost may be very competitive with glass MCP of lower performance.