NER: Ultrafast Laser-Assisted Scanning Probe Fabrication of Nanostructues

利用超快脉冲激光辐射与近场扫描探针显微镜相结合的方法，对纳米级表面工程进行了基础性的探索性研究。采用飞秒激光源与扫描AFM/STM系统相结合的新型实验装置。根据不同的工艺参数，可以实现高清晰度的纳米加工和纳米沉积。研究了激光强度分布、波长和偏振与样品/探针尖端材料参数的关系。通过各种微观分析技术对所制备的纳米特征的完整性、耐久性、机械、化学和电学结构性能进行了表征。长期目标是开发关键工艺参数、图案特征和修饰表面的材料特性之间的函数关系，从而实现纳米结构的优化。

Basic exploratory research is performed on nanoscale surface engineering through means of ultra-fast, pulsed laser radiation coupled with near-field scanning probe microscopy. A new experimental apparatus consisting of a femtosecond laser source coupled with a scanning AFM/STM system is used for this purpose. Depending on the process parameters, high-definition nanomachining and nanodeposition can be achieved. The effects of the laser intensity distribution, wavelength, and polarization are examined in relation to the sample/probe tip material parameters. The integrity, durability, mechanical, chemical and electrical structural properties of the produced nanofeatures are characterized by various micro-analytical techniques. The long-term objective is the development of functional relationships between key process parameters, patterning features, and material properties of the modified surfaces that will enable nanostructure optimization.