SBIR Phase I: A Planar Excimer Lamp for Electronic Device Manufacturing

第一阶段小企业创新研究（SBIR）项目旨在开发一种新型平面准分子灯。与传统的圆柱形同轴灯相比，这种灯的设计提供了许多潜在的优势，包括高辐照度（100 mW/cm2），均匀的区域照明，紧凑的尺寸，改善冷却，更长的寿命和更低的成本。这种灯将被设计成易于集成到电子设备制造中使用的工具中。准分子灯的应用包括原位网架清洗、原位预沉积清洗、光化学气相沉积和紫外线固化。传统的紫外线灯不足以完成这些任务。准分子激光器可以很容易地照亮大范围的视场，但通常不适合集成到生产工具中，并且拥有成本非常高。本文确定了三个目标：1)设计和制作具有新型电极结构和灯芯设计的平面准分子灯；2)评估窄带准分子发射的面积均匀性；3)测量填充KrCl* (222 nm)或XeCl*(308 nm)的灯的紫外光谱、辐射功率输出和效率。该技术一旦开发成功，将应用于半导体制造行业。

This Phase I Small Business Innovation Research (SBIR) project is directed to the development of a novel planar excimer lamp. This lamp design offers numerous potential advantages over conventional cylindrical coaxial lamps which includes high irradiance (100 mW/cm2), uniform area illumination, compact size, improves cooling, longer life, and lower cost. This lamp will be designed to be easily integrated able in tools used in the manufacture of electronic devices. Excimer lamp applications include in-situ reticule cleaning, in-situ pre-deposition cleaning, photochemical vapor deposition, and UV curing. Conventional UV lamps are inadequate for these tasks. Excimer lasers, which can easily illuminate a large field size, are often inadequate at integrating into a production tool, and have a very high cost of ownership. Three goals has been established to guide this work in: 1) design and fabricate a planar excimer lamp with novel electrode structure and lamp cell design, 2) evaluate the area uniformity of the narrow band excimer emission, and 3) measure the UV spectra, radiant power output, and efficiency of the lamp filled with KrCl* (222 nm) or XeCl*(308 nm).The technology, once successfully developed, will be used the semiconductor manufacturing industry.