Engineering Research Center for Extreme Ultraviolet Science and Technology

科罗拉多州立大学（CSU）的极紫外线科学与技术工程研究中心与科罗拉多大学（CU）、加州大学伯克利分校和劳伦斯伯克利实验室X射线光学中心合作。 私家侦探中心主任是CSU电气和计算机工程教授Jorge Rocca博士。 ERC的愿景是廉价地利用电磁辐射的极紫外（EUV）软X射线范围来成像和测量小特征，特别是在VLSI掩模的计量和生物样本的显微镜检查中。 这些功能目前是使用同步辐射源进行的。 EUV波长可以成像纳米级特征，使ERC的交付物在操纵和生产纳米级物体方面非常有用。ERC基于与微电子公司的合作关系，将为推进和实施EUV和纳米级科学技术所需的物理学家和电气工程师准备多样化的劳动力

The Engineering Research Center for Extreme Ultraviolet Science and Technology at Colorado State University (CSU) in partnership with the University of Colorado (CU), the University of California, Berkeley, and the Center for X-Ray Optics, Lawrence Berkeley Laboratory. The P.I. and Center Director is Dr. Jorge Rocca, Professor of Electrical and Computer Engineering at CSU. The vision of the ERC is to inexpensively harness the extreme ultraviolet (EUV), soft x-ray range of electromagnetic radiation to image and measure small features, particularly in the metrology of VLSI masks and the microscopy of biological specimens. These functions currently are performed using synchrotron radiation sources. EUV wavelengths can image nanoscale features, making the deliverables of this ERC useful in manipulating and producing nanoscale objects. The ERC is based on a partnership with microelectronics firms and will prepare a diverse workforce of physicists and electrical engineers needed to advance and implement EUV and nanoscale science and technology