CRI: MEMS Integration Infrastructure

路易斯安那大学拉斐特分校将购买制造和表征CMOS-MEMS所需的设备；这些设备包括一个带摄像头的立体显微镜、一个轮廓仪、一个锁定放大器、一个低失真函数发生器、一个示波器、一个频谱分析仪和一个逻辑分析仪。该大学高级计算机研究中心的VLSI研究小组将对被视为集成的异质技术的片上系统(SOC)进行研究，该技术涵盖混合信号CMOS、CMOS-MEMS和单个芯片或封装上的VCSEL等光学器件。制造设备的应用包括传感器和机器人技术。该基础设施将用于该大学的研究、研究培训和教育。调查人员将与现有项目合作，包括麦克奈尔学者和路易斯安那州少数民族参与路易斯·斯托克斯联盟，以增加代表不足的学生参与相关学位课程的程度。

The University of Louisiana at Lafayette will acquire equipment needed for CMOS-MEMS fabrication and characterization; the equipment includes a stereoscopic microscope with camera, a profilometer, a lock-in amplifier, a low distortion function generator, an oscilloscope, a spectrum analyzer, and a logic analyzer. The VLSI research group at the University's Center for Advanced Computer Studies will conduct research on Systems-on-a-chip (SOC) viewed as integrated heterogeneous technologies where the technologies range over mixed signal CMOS, CMOS-MEMS and optical devices such asVCSELs etc. on a single die or package. Applications of fabricated devices include sensors and robotics. The infrastructure will be used in research, research training and education at the University. The investigators will partner with existing programs, including McNair Scholars and the Louis Stokes Louisiana Alliance for Minority Participation to increase the participation of under-represented students in related degree programs.