Development of ZnO Thin Films and Nanostructures on CMOS Wafers for Gravimetric Biosensors and "Touch" Pressure Sensors

用于重力生物传感器和触摸压力传感器的CMOS晶圆上ZnO薄膜和纳米结构的发展本研究的目标是开发能够检测空气和液体环境中单个蛋白质分子的超高灵敏度生物传感器阵列，以及用于人造皮肤的触摸压力纳米复合CMOS传感器。该方法是利用具有重要表面和压电性能的ZnO等新兴材料，研究和改进生物ZnO界面和纳米结构ZnO-SiO2体系的性能，在具有重要技术意义的SiO2和Si衬底上开发高质量的外延生长ZnO薄膜，以及创新的基于表面声波的传感技术和基于ZnO纳米结构CMOS的压力传感器。知识价值：这种先进传感器技术的发展将影响对国家至关重要的社会经济领域。在保健领域，通过大大减少时间和成本改进病原体的检测和疾病的监测；在体内和实地对有害生物材料进行环境监测领域，通过早期预警检测有效解决冲突，保护民众和士兵；在假肢跛行和永久性神经损伤患者领域，通过为假肢跛行患者的人造皮肤开发触摸压力传感器阵列；并为截瘫患者提供疼痛感。更广泛的影响：这项技术在两个方面具有广泛的经济影响。首先是节省生物分析的资金和时间，其次是为集成传感器技术创造一个新的高科技产业，为大学毕业生提供大量的就业机会。这些工程和科学专业的毕业生将会有很高的技能，因为他们受益于生物材料与无机半导体界面的基本知识，以及开发这种集成传感器技术所涉及的参数。他们将成为保持国家高科技领先地位的重要资产。

Proposal: ECS0601481Development of ZnO Thin films and Nanostructures on CMOS Wafers for Gravimetric Biosensors and Touch Pressure Sensors The objective of this research is to develop ultra-high sensitivity biosensor arrays capable of detecting single protein molecules in air and liquid environments, and touch pressure nanocomposite CMOS based sensors for artificial skin applications. The approach is to use emerging promising materials like ZnO having important surface and piezoelectric properties, study and improve the properties of the bio-ZnO interface, and the nanostructured ZnO-SiO2 system, and develop high quality epitaxially grown thin ZnO films on the technologically important dissimilar substrate of SiO2 and Si, as well as innovative surface acoustic wave based sensing technology, and ZnO nanostructured CMOS based pressure sensors. Intellectual merit: The development of such advanced sensor technology will impact socio-economic areas crucial to the country. The area of health care by improving detection of pathogens and monitoring of illnesses at substantially reduced time and cost, the area of environmental monitoring of hazardous biomaterials in vivo and in the field by early warning detection for effective conflict resolution, protecting population and soldiers, the area of prosthetic limp and permanent nerve damage patients, by developing touch pressure sensor arrays for artificial skin in prosthetic limp patients, and provide the sense of pain to paraplegic patients. Broader Impact: This technology has a broad economic impact on two fronts. First by saving money and time on bio-analysis, and second on creating a new high tech industry for integrated sensor technologies providing a substantial number of jobs for college graduates. These engineering and science graduates will be highly skilled as they benefit from the educational development resulting from the fundamental knowledge of the interfacing of biomaterials with inorganic semiconductors, and the parameters involved in developing such integrated sensor technology. They will represent an important asset contributing to maintain the high technology leadership of the country.