A Coordinate Measuring Machine for Three-Dimensional Micro Devices

本研究项目的目标是创建一种能够快速获取由几何复杂的微/纳米特征组成的工程设备的三维坐标数据的坐标测量机。该方法包括三项技术创新。第一个是设计了一种新型的多轴探测系统，该系统可以同时控制尖端位置和尖端方向，并能够实现三维结构的快速表面数字化。它可以根据样品的表面法线来调整针尖的方向，从而在数字化具有较大几何变化的曲面时精确地控制尖端与样品的相互作用点。第二个创新是双执行器叶尖运动控制方案，实现了高带宽的叶尖运动控制。它的目的是使探头的整个悬臂带宽可用于快速坐标获取。第三个创新是将多轴探测系统与超精密六轴运动控制平台相结合，实现多轴联动机床。成功完成后，这些技术创新将对先进仪器和现代制造技术产生重大影响。它将为扫描探针显微镜增加一个新的维度，特别是使微型设备的三维坐标计量成为可能。获得的坐标数据将在尺寸控制、公差和不确定度分析方面为三维工程装置的设计和制造提供便利。

The objective of this research project is to create a coordinate measuring machine that enables rapid acquisition of three-dimensional coordinate data of engineered devices consisting of geometrically complicated micro/nano features. The approach consists of three technological innovations. The first one is the design of a novel multi-axis probing system, which can simultaneously control the tip position and tip orientation, and which enables rapid surface digitization of three-dimensional structures. It can regulate the orientation of the tip according to the surface normal of the sample, and thus precisely control the tip-sample interaction point when digitizing surfaces that have large geometric variations. The second innovation is a dual-actuator tip-motion control scheme which achieves high bandwidth tip-motion control. It aims to make the entire cantilever bandwidth of the probe available for rapid coordinate acquisition. The third innovation is to integrate the multi-axis probing system with an ultra precision six-axis motion control stage to realize a multi-axis coordinate machine.Upon successful completion, the technological innovations will have significant impact on advanced instrumentation and modern manufacturing technology. It will add a new dimension to scanning probe microscopy in general and enable three-dimensional coordinate metrology of micro devices in particular. The acquired coordinate data will facilitate the design and production of three-dimensional engineered devices in terms of dimensional control, tolerancing, and uncertainty analysis.