SGER: SiC Nanowire Field Effect Transistors using Preceramic Polymers

本研究的目的是了解形貌对碳化硅纳米线结晶的影响以及基于此的场效应晶体管的性能。除其他应用外，纳米线晶体管还可用于高速计算机。系统地改变纳米线的尺寸以研究其对再结晶温度的影响。然后将用这些纳米线制造晶体管，并将评估其性能特性。该项目的智力优势是对纳米结构中的退火和结晶有了更多的了解。这项工作通过系统地探索直径和长度对这种热转变的影响来扩展已知的内容。此外，它还将阐明形态和维度在控制纳米结构结晶中的作用，并将我们的知识从基于元素固体的纳米结构扩展到基于化合物的纳米结构。这一结果可以应用于许多其他纳米结构。更广泛的影响是使纳米电子能够融入集成电路，而不需要对现有生产线进行重大和昂贵的重新设计。与传统器件相比，纳米线晶体管的性能优势与碳化硅在高功率水平和高温下运行的能力相结合，将为航空航天、汽车、国防、电力和电信行业带来实质性好处。展示一种易于实现商业规模实施的方法将对半导体行业的国际竞争力产生重大影响。参与这个项目的学生将接触到先进的纳米电子制造技术。

The objective of this research is to understand the effects of morphology on the crystallization of silicon carbide nanowires and the performance of field effect transistors based on the same. Nanowire transistors are of interest for use in high speed computers among other applications. The nanowire dimensions will be systematically varied to investigate the effect on recrystallization temperature. Transistors will then be fabricated with these nanowires and performance characteristics will be evaluated.The intellectual merit of this project is an increased understanding of annealing and crystallization in nanostructures. This work expands on what is known through a systematic exploration of the effect of diameter and length on such thermal transitions. In addition, it will elucidate the roles of morphology and dimensionality in controlling nanostructure crystallization, and extend our knowledge beyond nanostructures based on elemental solids to those based on compounds. The results of this can be applied to numerous other nanostructures.The broader impact is to enable the incorporation of nanoelectronics into integrated circuits without requiring significant and costly redesign of existing manufacturing lines. The combined performance advantages of nanowire transistors vs. conventional devices and the ability of silicon carbide to operate at high power levels and high temperatures would be of substantial benefit to the aerospace, automotive, defense, power and telecommunications industries. The demonstration of a method to easily enable commercial scale implementation would have a significant impact on the competitiveness of the semiconductor industry internationally. Students involved in this project will gain exposure to advanced nanoelectronics fabrication techniques.