Vibration Mitigation in Inchworm Nanopositioners for SPMs

在不损失带宽的情况下增加范围的挑战是纳米定位系统中的常见问题。 拟议的研究将通过开发尺蠖定位器来解决这一挑战，这些定位器在尺蠖的每一步中实现高分辨率定位，同时允许多步大范围定位。为此，研究将开发新的振动缓解工具的系统切换动态。该研究将：（1）开发没有振动的最佳输出转换，这改进了当前的状态转换方法;（2）反转由于尺蠖中边界条件的改变而产生的切换动态系统;（3）使用反转方法来解释滞后输入非线性;以及（4）开发用于集成跟踪/复位问题的基于预览的技术。由此产生的最佳方法将用于减轻每个尺蠖步骤引起的过渡振动。 因此，所提出的工作将实现大范围，高带宽的定位，而不会损失的分辨率，由于运动引起的振动在过渡期间。尺蠖的振动缓解策略将在纳米定位过程中进行评估。总之，拟议的研究将：（1）开发新的工具，振动缓解系统与切换动态;（2）增加带宽，而不损失范围的纳米定位systems.The拟议的研究将有广泛的影响，因为它提高了纳米定位扫描探针显微镜，这是关键的使能工具，在纳米科学和纳米技术。拟议的研究将通过纳米定位和振动缓解方面的新高级顶点设计项目提供纳米技术的培训和教育。此外，拟议的工作将为本科生提供研究和教育经验，并促进少数民族学生参与研究。因此，拟议的工作将有助于建立新兴纳米技术所需的研究和人力资源基础设施。

The challenge to increase range without loss of bandwidth is a common problem in nanopositioning systems. The proposed research will address this challenge by developing inchworm positioners that achieve high-resolution positioning within each step of the inchworm while allowing large range with multiple steps. Towards this, the research will develop novel vibration mitigation tools for systems with switched dynamics. The research will: (1) develop optimal output transitions without vibrations which improve on current state transition approaches; (2) invert switched dynamic systems that arise due to the changing of boundary conditions in the inchworm; (3) account for hysteresis input nonlinearities using inversion methods; and (4) develop preview-based techniques for the integrated tracking/resetting problem. The resulting optimal approach will be used to mitigate transitional vibrations caused by each inchworm step. Thereby, the proposed work will achieve large-range, high-bandwidth positioning without loss of resolution due to movement induced vibrations during transitions. The vibration-mitigation strategy for the inchworm will be evaluated during nanoscale positioning. In summary, the proposed research will: (1) develop new tools for vibration mitigation in systems with switched dynamics; and (2) increase the bandwidth without loss of range in nanopositioning systems.The proposed research will have broad impact on nanotechnology since it improves nanopositioning in scanning probe microscopes, which are key enabling tools in nanoscience and nanotechnology. The proposed research will provide training and education in nanotechnologies through novel senior-level capstone design projects in nanopositioning and vibration mitigation. Additionally, the proposed work will offer research and educational experience to undergraduate students and promote the involvement of minority students in research. Thus, the proposed work will help to build the research and human resource infrastructure needed in emerging nanotechnologies.