Diamond layer architecture with locally adapted properties

金刚石涂层具有硬度高、耐磨性好、光学带隙大、化学稳定性好等优点。现代涂层技术提供了金刚石与其他涂层材料的结合。然而，到目前为止，这些技术都需要一个顺序的过程组合。在第一个资助期，研究了一种新工艺，可以将杂质嵌入生长中的金刚石层。为此，利用固体前驱体热汽化的可能性，对激光等离子体cvd工艺进行了改进。通过在激光真空室自由等离子体射流中汽化固体前驱体，硅和铝可以以个位数的百分比嵌入到金刚石层中。也可以用同样的方法沉积多层涂层。在将化学杂质原位掺入金刚石层后，在第二个资助周期中，杂质的分级或阶梯式分布是目标，同时，层内的杂质分布应该是均匀的。重点研究了含杂质金刚石层的工艺-性能关系。掺杂铝硅杂质的cvd -金刚石层的光致发光光学活性将是一个主要问题。由于金刚石涂层具有较高的硬度、良好的摩擦和滑动性能，因此金刚石涂层作为耐磨涂层的使用越来越多，因此这些研究的一个前景应用潜力将是开发原位磨损检测工具涂层。

Diamond layers outclass conventional coating materials due to the high hardness and wear resistance, the big optical band gap and the chemical stability. Modern coating technologies provide the combination of diamond together with other coating materials. However, up to now a sequential process combination is required by these technologies. In the first funding period a newprocess was investigated, which enables to embed impurities in a growing diamond layer. For this purpose a laser based plasma-CVD-process was upgraded by the possibility of a thermal vaporization of solid precursor. It could be shown that silicon and aluminum can be embedded into a diamond layer in a single-digit percent range by vaporizing solid precursor in a laser basedvacuum chamber free plasma-jet. Also multilayer coatings are possible to be deposited by the same process. After providing an in-situ incorporation of chemical impurities into a diamond layer, a graded or stepped distribution of the impurities is aimed in a second funding period, while simultaneously the impurity distribution within a layer should be homogeneous. Particularly theprocess-property-relation of the diamond layers with incorporated impurities are planned as object of research. The optical activity in kind of photoluminescence of the CVD-diamond layers with incorporated aluminum respectively silicon impurities will be a main issue. A perspective application potential of these researches would be the development of an in-situ wear detecting tool coating, because the use of diamond layers as wear-resistant coating increases due to the high hardness, the good friction and slide properties.