Nanopositioning, -measuring and -patterning on extended surfaces and volumes for characterization, design and fabrication of advanced optical components and systems.

纳米定位和测量机（NPMM）能够在扩展表面上以纳米精度定位、测量、探测和操纵物体。高分辨率和快速检测局部属性，如缺陷，故障或设计偏差，可以适用于扩展的光学组件和系统，多尺度测量策略和传感器融合比单个传感器探测更灵活。传感器融合使用例如等离子体近场传感器和光学超材料将高精度绝对形状测量与低于光学系统的分辨率极限的纳米尺度上的附加信息相结合。在这种多传感器系统中选择合适的传感器并确定其参数将由辅助系统自动执行。在高精度制造的最后精加工步骤中，光学表面的误差降低到10 nm水平（rms）或更低，其关键要素是绝对测量。光学功能表面（例如非球面、自由形状、DOE和混合元件）的这种高精度表征可以通过将光学全场方法与NPMM 200测量相结合来改进。金刚石或SiC等固体中的原子杂质必须以优于10 nm的空间精度定位，以显示量子相关性。在不同长度尺度上处理的额外控制和通信结构必须与量子电路和量子处理器相结合。这些控制结构由超导环组成，它们的位置使用NPMM-200确定。这种昂贵而独特的设备的集成将在ITO的远程实验室概念中实现。基于这样一个概念，并参考一个系统的访问过程，NPMM可以由远程用户应用。虚拟纳米加工和纳米测量中心的实施是这些调查的目标。

Nanopositioning and measuring machines (NPMM) enable positioning, measuring, probing and manipulating of objects with nanometer precision on extended surfaces. High resolution and fast detection of local properties like imperfections, faults or deviations from design can be adapted to extended optical components and systems much more flexible with a multi-scale measurement strategy and sensor fusion than probing with individual sensors. Sensor fusion combines high precision absolute shape measurement with additional information on the nanoscopic scale below the resolution limit of optical systems using e.g. plasmonic near-field sensors and optical metamaterials. Selection of suitable sensors in such a multisensor system and determination of their parameters will be performed automatically by an assistance system. Key element in the final finishing step of high precision fabrication, where the error of the optical surface is reduced to the 10 nm level (rms) or below, is the absolute measurement. Such a high precision characterization of optical functional surfaces like e.g. aspheres, free forms, DOEs and hybride elements can be improved by combining optical full field methods with NPMM200 measurements. Atomic impurities in solids like Diamond or SiC must be positioned with a spatial accuracy of better than 10 nm in order to show quantum correlations. Additional control and communication structures processed on different length scales have to be combined to quantum circuits and quantum processors. These control structures consist of superconducting rings, their position is determined using the NPMM-200. Integration of such an expensive and unique device will be realized at ITO within a remote laboratory concept. Based on such a concept and referring to a systematic access procedure, the NPMM could be applied by remote users. The implementation of a virtual nano-processing and nano-measurement center is objective of these investigations.