Scanning Probe Processing of 2D Materials

二维（2D）材料在过去的几年里吸引了很多关注，因为当这些材料被隔离时会出现独特的特性。因此，利用二维材料的固有特性进行各种新的应用的兴趣不断增加。到目前为止，大多数包含二维材料的原型器件都是通过基于抗蚀剂的湿化学光刻技术制备的。然而，这些基于抗蚀剂的工艺通常会留下大量的残留物，这些残留物会污染2D材料并导致其优异和期望的性能的显著劣化。因此，开发无抗蚀剂和可靠的光刻工艺对于充分利用基于二维材料的器件的性能潜力至关重要。一种有前途的实现二维材料无抗蚀剂光刻工艺的方法是基于扫描探针方法，该方法能够诱导具有纳米空间分辨率的材料的局部改性。然而，到目前为止，基于扫描探针的光刻工艺在二维材料上的深入研究仍然是有限的，甚至是不存在的，本项目旨在归纳和评估基于扫描探针的光刻工艺在选定的二维材料上。为了实现这一目标，将应用量身定制的机器人多探针设置，实现并促进直接和快速的分类，修改以及表征程序。通过这种方式，系统的研究重点是基于扫描探针的光刻工艺在2D材料上的关键工艺参数将变得可行，从而可以获得有关物理化学过程的更深入的知识。

Two-dimensional (2D) materials have attracted a lot of attention within the last few years owing the unique properties that emerge when these materials are isolated. Thus, the interest to apply the inherent properties of 2D materials in different kinds of novel applications constantly increases.So far, most of the prototypic devices that incorporate 2D materials have been fabricated by implementing resist-based, wet-chemical lithographical techniques. However, these resist-based processes commonly leave substantial amounts of residuals that contaminate the 2D materials and induce considerable deteriorations of their excellent and desired properties. Hence, the development of resist-free and reliable lithographical procedures is of crucial importance for exploiting the full performance potential of devices based on 2D materials.A promising methodology for enabling resist-free lithographical processing of 2D materials is based on the scanning probe approach that is capable of inducing local modifications of materials with nanoscale spatial resolution. However, until now, thorough studies of scanning probe based lithographical processes on 2D materials are still limited or even unavailable.This project aims at inducing and evaluating scanning probe based lithographical processes on selected 2D materials. To achieve this goal, a tailored robotic multiprobe setup will be applied, enabling and facilitating direct and fast classification, modification as well as characterization procedures. In this way, systematic studies focusing on critical process parameter of scanning probe based lithographical processes on 2D materials will become feasible allowing to gain a deeper knowledge on the relevant physicochemical processes.