Development of novel materials surface modification/fabricationTechnology with a use of supercritical fluid ion beam

本论文主要研究了超临界流体离子（束）的制备、超临界流体等离子体作为离子源的光谱诊断及其在材料表面处理/制备工艺中的应用。然后，从总体上肯定了高性能工艺的本质，如低温工艺和环境友好工艺。因此，创新的高性能材料的表面处理/制造工艺的可能性被证明。

In this study, fabrication of supercritical fluid ion (ion beam), spectroscopic diagnostics of supercritical fluid plasma as ion source, and its application to materials surface treatment/fabrication process were performed. Then, totally, the nature of high-performance process nature, such as its low-temperature process and environmental friendly process, were confirmed. As a result, the possibility of innovative high-performance materials surface treatment/fabrication process was demonstrated.