Development of High-Speed-Scanning, Three-dimensional Mapping System

研制了高速扫描三维测绘系统，可对腐蚀损伤面和断裂面等表面形貌进行空间遥测。该系统是基于已应用于磁光盘系统聚焦伺服系统的激光聚焦误差信号法，对光学系统进行了新的设计，以测量170 μ m的腐蚀损伤表面的较宽范围，并对样品的反射率变化进行了补偿，消除了荧光灯等干扰光。测量了腐蚀坑、腐蚀疲劳中的腐蚀损伤面、循环应力腐蚀裂纹和空气中疲劳的断口以及腐蚀磨损面等三维形状;该系统能够精确测量宽区域（25 mm）的三维形状，包括腐蚀坑等高度突然变化的表面。

The high-speed-scanning, three-dimensional mapping system has been developped, which can spatially and remotely measure the surface topographies including corrosion damaged surfaces and fracture surfaces. The system is based upon the astigmatic focus error signal method using laser lights, which has been already applied to the focal servo system in magnetooptical disk systems.The optical system was newly designed in order to measure a wider range of 170 mu m for corrosion damaged surfaces, and was improved to compensate the reflectivity changes of specimens and to remove disturbing lights from such as fluorescent lamps. The three-dimensional shapes, including corrosion pits, corrosion damaged surfaces in corrosion fatigue, fracture surfaces of both cyclic stress corrosion cracking and fatigue in air, and the surface of corrosive wear were measured; the system is able to measure precisely the wide areas ( 25 mm) of three-dimensional shapes, including surfaces which have sudden height changes such as corrosion pits.