Preparation of Ag-alloy top-electrode for ferrolectric films.

提出了一种银合金（97Ag-1Pd-2Cu (mol%)）作为锆钛酸铅（PZT）膜的新型顶电极。对合金的成分进行了分析。对于在纯银中添加0.1%或更多Pd的组合物的电极，该电极的绝缘电阻有所提高。该组合物的电极的耐热性、绝缘性能和粘附特性得到了改善，该组合物将铜从0.1 ~ 5%转化为纯银。2。采用化学溶液沉积法（CSD法）在Pt/Ti/SiO_2/Si衬底上制备了PZT铁电薄膜。采用溅射法在PZT薄膜上制备了直径为0.5mm的Pt和银合金顶电极。得到的薄膜在氧气和氢气气氛（N_2-4%H_2）中热处理，得到以下知识：(1)氧环境Pt和ag合金电极都能在500℃以下保持优异的铁电性。(2)在氢气气氛下，PZT薄膜在3CO℃以上退火后，铁电性消失。在300℃以上退火后，观察到Pt底电极从衬底脱落。对于ag合金顶电极，在400℃退火后，ag合金电极与PZT膜未发生化学反应。采用银合金电极对PZT薄膜进行350℃退火后，其铁电性仍保持不变。推测本研究开发的银合金电极可作为铁电材料的新型电极。

An Ag-alloy (97Ag-1Pd-2Cu in mol%) was proposed as a new top-electrode for lead zirconate titanate (PZT) films.1. The composition of the Ag-alloy was examined. The insulation resistance of the electrode has improved to the electrode of the composition which adds Pd of 0.1% or more to the pure silver. A heat-resistant, the insulation resistance, and adhesion characteristic have improved to the electrode of the composition which does Cu from 0.1 to 5% to the virgin silver.2. PZT ferroelectric thin film was prepared on the Pt/Ti/SiO_2/Si substrate by chemical solution deposition method (CSD method). Pt and the Ag-alloy top-electrode of 0.5mm in the diameter were made on this PZT thin film by the sputtering method. The obtained film was heat-treated by the oxygen and hydrogen atmosphere (N_2-4%H_2), and the following knowledge was obtained.(1) Oxygen atmosphereIt has been understood for both Pt and the Ag-alloy electrode to be able to maintain excellent ferroelectricity up to 500℃.(2) Hydrogen atmosphereIn the case of Pt top-electrode, the ferroelectricity of PZT films disappeared after annealing over 3CO℃. Exfoliations of Pt bottom-electrode from substrate were observed after annealing over 300℃.In the case of the Ag-alloy top-electrode, no chemical reaction between the Ag-alloy electrode and PZT film was observed after annealing at 400℃. The ferroelectricity of PZT film was maintain ed even after annealing at 350℃ using the Ag-alloy electrode.It is guessed that the Ag alloy electrode developed by this research can be used as new electrode for ferroelectric materials.