Photonic Integrated Circuits for High Speed Photonic Networks-Challenges for Large Scale Photonic Integration-

大规模光子集成电路（Photonic IC）是未来大容量光子网络（包括城域网、高速光子局域网和光互连）的关键器件。本项目的目的是建立大规模集成光子器件的器件科学与技术，包括多波长激光器阵列、超紧凑微腔谐振器等，实现了1100 nm波段100通道多波长VCSEL阵列的发射。我们还提出并证明了一个“无热VCSEL”，避免温度控制器的非制冷WDM应用。采用一种新型的热驱动薄膜反射镜，VCSEL的激射波长的温度依赖性可以降低50倍。在此基础上首次实现了无热可调的工作，并在VCSEL上实现了光信号处理的新功能。我们展示了一种光学非线性移相器， ...更多信息 在VCSEL可饱和吸收体上。在建模和实验中都可以观察到较大的非线性相移。所提出的装置将是有用的，以减轻光纤的非线性光学域和光学操纵光的相位。布拉格反射波导具有较大的波导色散，可以在其中获得慢光。基本结构与VCSEL中使用的结构相同。我们展示了一个慢光调制器与布拉格波导，这表明了低调制电压的可能性，即使是超紧凑的波导调制器。我们最近的工作展示了超小型光波导慢光开关的可能性，我们还展示了一种可调空芯光波导，用于一类新的光子集成电路。我们介绍了空芯波导的各种特性，并将其与微电子机械系统（MEMS）相结合，将产生广泛的可调谐波导器件。结果表明，采用可变空气芯时，传播常数有可能发生10%以上的较大变化。我们展示了各种各样的基于中空波导的器件应用，包括可调谐布拉格反射器，可调谐色散补偿器和可调谐激光器。器件结构可以通过基于光刻和蚀刻的全平面制造工艺形成。这一概念的提出开辟了一种新型的可调谐光学器件，具有调谐范围宽、尺寸小、温度不敏感等特点，利用高折射率对比度光波导，可以实现波导分支、马赫-曾德尔干涉仪、阵列波导光栅滤波器、微腔谐振器滤波器等超小型光学器件。我们提出并论证了垂直耦合介质微谐振器作为分插滤波器，以及利用双串联耦合介质微谐振器的热光效应实现无瞬断波长信道选择开关。利用游标效应将波长选择开关的调谐范围扩展到10 nm以上，实现了大于20 dB的大消光比。少

A large scale photonic integrated circuit (Photonic IC) is a key device for use in future ultrahigh capacity photonic networks including metro-area networks, high speed photonic LANs and optical interconnects. The purpose of this project is to establish the device science and technology on massively integrated photonic devices including multiple wavelength laser arrays, ultra-compact microring resonators and so on.We realized 100 channel multi-wavelength VCSEL arrays emitting in 1100nm wavelength band. We also proposed and demonstrated an "athermal VCSEL" with avoiding temperature controllers for uncooled WDM applications. The temperature dependence of the lasing wavelength of VCSELs could be reduced by a factor of 50 with a novel thermally-actuated membrane mirror. We achieved athermal and tunable operations for the first time based on this concept.In addition, new functions on VCSELs for optical signal processing are realized. We demonstrated an optical nonlinear phase shifter based … More on a VCSEL saturable absorber. A large nonlinear phase shift could be observed in both modeling and experiments. The proposed device would be useful for mitigating fiber nonlinearities in optical domain and for optically manipulating the phase of light. Slow light can be obtained in Bragg reflector waveguides with their large waveguide dispersion. The basic structure is the same as that used in VCSELs. We demonstrated a slow light modulator with a Bragg waveguide, which shows a possibility of low modulation voltage even for ultra-compact waveguide modulators. Our recent work exhibited a possibility of ultra-compact optical waveguide switches with slowing light.We also demonstrated a tunable hollow optical waveguide with a variable air core toward a new class of photonic integrated circuits. We presented various unique features in hollow waveguides and thecombinationwith microelectro-mechanical system (MEMS) will gives us widely tunable waveguide devices. The result shows a possibility of a large change of over 10% in propagation constant with a variable air core. We exhibited a wide variety of device applications based on hollow waveguides, which include tunable Bragg reflectors, tunable dispersion compensators and tunable lasers. The device structure can be formed by fully planar fabrication processes based on lithography and etching. The proposed concept may open up a new class of various tunable optical devices, which give us unique features of wide tunability, compact size and temperature insensitivity.Utilizing high index contrast optical waveguides, ultra-compact optical devices such as waveguide branch, Mach-Zehnder interferometer, arrayed waveguide grating filter, microring resonator filter, and so on could be realized. We have proposed and demonstrated a vertically coupled microring resonator as an Add/Drop filter, and a hitless wavelength channel selective switch using Thermo-Optic effect of double series coupled dielectric microring resonator. The tuning range of wavelength selective switch was expanded to over 10nm using the Vernier effect, and a large extinction ratio of more than 20dB was realized. Less