Precision Lapping of Substrata Such As Aluminum, etc. by Fixed Abrasives

为了弥补精密光整加工中广泛采用的无磨料研磨加工的缺点，针对固定磨料(主要是PVA结合磨料)在精密加工中的新应用，对其应用进行了探讨。主要研究结果如下：[1]对PVA结合剂磨料的硬度、弹性模数等力学性能进行了测试和评价。首先，从理论和实验两个角度对以下几点进行了定量的讨论：(1)机械特性的大小很大程度上取决于干湿条件。(2)PVA固定磨料的工作面和内部的硬度存在很大的差异。(3)固定磨料工作表面的硬度变化对几何精度有很大的影响。研磨特性的时序变化是不可避免的。[3]决定固定磨料研磨几何精度的重要因素之一是尽可能长时间地保持研磨板的高度整齐平面度。[4]对固定磨料加工中表面粗糙度的产生机理进行了实验研究，并将其分为以下三种类型：(1)仿形(2)中间型(3)抛光型

For the purpose of making up the weak points of free abrasive lapping processing which have been widely used so far as the precision finishing processing, a new application of fixed abrasives (here, PVA bonded abrasives are taken up mainly) was aimed at and its utility was discussed. The results obtained here are summarized as follows :[1] Such mechanical characteristics of PVA bonded abrasives as hardness, modulus of elasticity and so on were measured and estimated. Above all, next points are important and quantitatively discussed from both theoretical and experimental view points.(1) The values of the mechanical characteristics depends quite a lot on dry or wet condition.(2) There exists considerable variance in hardness on its working surface and inside of PVA fixed abrasives.(3) The variance of the hardness on the working surface of fixed abrasives influences geometrical accuracy considerably.[2] In fixed abrasives lapping, time-series change of lapping characteristics can not be avoidable.[3] One of the most important factors which rule the geometrical accuracy in fixed abrasives lapping is to maintain highly trued flatness of a lapping plate as long as possible.[4] The generation mechanism of surface roughness in the fixed abrasives processing was investigated experimentally and classified into next three types.(1) Copied type(2) Intermediate type(3) Burnishing type