Super Highly Sensitive Non visible Imaging Devices Using Vacuum Nano Technology

本课题的重点是实现高灵敏度的可见光光电阴极和可探测2 μ m以上波长的红外光电阴极，并提出了一种新型光电探测器--“光敏浮置场发射体（PFFE）”。PFFE由n型锥形场致发射器和Si p-n光电二极管组合而成。该器件制作在减薄的硅衬底上，从背面照射。在场发射器中构造p-n光电二极管，并且n+区域被p+区域分隔以检测二维光分布。量子效率达到70%。研究了一种基于Pb（Zr，Ti）O_3（PZT）薄膜场发射原理的红外光传感器。能够提高灵敏度以执行表面抛光，并且抛光的发射平面的发射效率增加到未抛光的发射平面的发射效率的两倍。在低红外光照射条件下，发射电流的噪声水平非常大。为了使用微通道板（MCP）装置，对发射电子进行放大。发射电子可放大40倍，在低辐照条件下可清晰观察到发射电子。电子发射型红外光传感器还可用于在低照射条件下检测红外光。

The porous of this project was realization of a visible photocathode with high sensitivity, and infrared photocathode which can detect above 2 micron wavelength.A new type photodetector called "photosensitive floating field emitter, PFFE" has been proposed. The PFFE was combined the n-type cone-shaped triode field emitter with Si p-n photodiode area. The device was fabricated on a thinned silicon substrate to irradiate from the backside. A p-n photodiode was constructed in a field emitter, and the n+ region was separated by p+ regions to detect two- dimensional light distributions. The quantum efficiency reached to 70%. The efficiency will increase to provide non refractive film on the surface.An infrared light sensor based on principle of a field emission from Pb(Zr,Ti)O3 (PZT) thin plate has been studied. The sensitivity is able to be improved to perform a surface polish, and the emission efficiency of polished emission plane increased to twice than that of the unpolished emission plane. On a low infrared light irradiation condition, a noise level of emission current was very large. To use a Micro-Channel-Plate (MCP) device, the amplification of the emission electrons was carried out. The emission electrons could be multiplied 40 times, the emission electron was clearly observed under low irradiation conditions. The electron emission type infrared light sensor is also useful to detect an infrared light on low irradiation condition.