Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processes

液体等离子体是一种很有前途的新型等离子体源。然而，反应测量是困难的，因为等离子体诊断已经发展为低压等离子体过程。因此，我们开发了一种新的测量系统，使用红外吸收光谱在多次内反射几何（MIR-IRAS）的液体中的等离子体。我们成功地测量了等离子体过程：由于溶液中等离子体的产生，溶液的化学状态和沉积物的化学状态发生了变化。我们还成功地测量了等离子体与生物模型材料的反应。这一结果表明MIR-IRAS适用于生物和医学应用的液体中血浆的诊断。

Plasma generated in liquid is a new promising plasma source. However, the reaction measurement is difficult because plasma diagnostics have been developed for low-pressure plasma process. Thereby, we developed a new measurement system for plasma in liquid, using Infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). We succeeded in the measurement of the plasma process: the changes in chemical states of the solution and the chemical states of deposits due to the plasma generation in the solution. We also succeeded in the measurement of the reaction of the plasma with bio-model materials. This result suggests the MIR-IRAS is suitable to diagnostics of plasma in liquid for the bio- and medical application.