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Compact x-ray nanoscopy

Compact x-ray nanoscopy
紧凑型 X 射线纳米显微镜
批准号：
8746693
负责人：
HAN WEN
金额：
$5.81万
依托单位：
NATIONAL HEART, LUNG, AND BLOOD INSTITUTE
依托单位国家：
美国
项目类别：
财政年份：
--
资助国家：
美国
项目状态：
未结题
起止时间：
至
来源：
https://reporter.nih.gov/project-details/8746693
关键词：
Atomic Force MicroscopyBiologicalElectron BeamFilmGoalsGoldImageImaging technologyOpticsPhaseRadiationReadingResolutionSamplingSourceSystemnanometernanoscalesuccess

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中文摘要
翻译
为了在没有高度专业化和昂贵的x射线光学元件的情况下在台式规模上实现纳米级x射线成像，我们正在开发一种对x射线和电子束辐射敏感的放大光刻胶薄膜，并且可以支持纳米级特征。这些特征可以通过紧凑的原子力显微镜精确地量化。我们在金放大电子束抗蚀剂系统中取得了初步成功，并获得了50纳米分辨率的x射线光栅射线照片。金光转换层的放大作用使所需的x射线能量减少了45倍。
英文摘要
To realize nano scale x-ray imaging on a benchtop scale without highly specialized and costly x-ray optical componenets, we are developing an amplified photoresist film that is sensitive to x-ray and electron beam radiation, and can support nanometer scale features. These features are read accurately quantified by a compact atomic force microscopy. We have achieved initial success in a gold amplified E-beam resist system and obtained radiographs of x-ray gratings at 50 nm resolution. The amplification by a gold photo-conversion layer reduced the required x-ray energy by a factor of 45.
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