A MEMS multi-spectral transducer array

提出的研究计划的目标是设计和制造基于MEMS的多光谱换能器阵列，该阵列能够同时在光谱的声学和微波部分产生和收集信息。平面和非平面电容式微机械超声换能器（CMUT）阵列和基于MEMS的超宽带（UWB）微波雷达的最新技术将被扩展到开发一种多光谱换能器阵列，该阵列集成了非平面CMUT阵列和超宽带MEMS雷达的能力。使用平面或非平面CMUT阵列的波束形成和波束导向能力的声学成像将识别目标区域中的物体或特征，而使用超宽带雷达的微波成像将能够通过生成与仅使用超声波成像技术相比具有更高分辨率和最佳深度的图像来查看物体或特征的内部。两种不同转导技术的微尺度融合将推动高分辨率3d成像技术的发展，从而实现成本更低、速度更快、体积更小、成像能力更高的设备。换能器阵列可用于各种应用中的非侵入性或非破坏性成像，例如医疗诊断成像，汽车避碰，材料表征以及基于生物识别的识别和安全目的。换能器的同时声学和微波成像能力将在医疗诊断应用中提供许多优势，这将导致更容易治愈且治疗成本更低的医疗条件的早期诊断。这项研究的进行也将有助于培养一批高素质人才。计划中的技术转让倡议应提高参与合作研究和创新伙伴关系的加拿大公司的全球竞争力。

The objective of the proposed research proposal is to design and fabricate a MEMS based multi-spectral transducer array that is capable of generating and gathering information concurrently in the acoustical and microwave portions of the spectrum. The state-of-the-art in planar and non-planar capacitive micromachined ultrasonic transducer (CMUT) array and MEMS based ultrawideband (UWB) microwave radar will be extended to develop a multi-spectral transducer array that integrates the capabilities of both the non-planar CMUT array and the UWB MEMS radar. While the acoustical imaging using the beamforming and beamsteering capability of the planar or non-planar CMUT array will identify an object or feature in the target area, the microwave imaging using the UWB radar will enable to look inside the object or the feature by generating an image with a much higher resolution and optimum depth compared to that obtained if only the ultrasonic imaging technique is used. A microscale fusion of two different transduction technologies will advance the state-of-the-art in high resolution 3-D imaging that will result in lower cost faster smaller equipment with a higher imaging capability. The transducer array can be used for non-intrusive or non-destructive imaging in diverse applications such as medical diagnostic imaging, automotive collision avoidance, material characterization, and for biometric based identification and security purposes. The transducer's simultaneous acoustical and microwave imaging capability will offer many advantages in medical diagnostic applications that will lead to the earlier diagnosis of medical conditions when they are more readily curable and less costly to treat. The conduct of the research will also contribute to the development of a number of highly qualified persons (HQP). The planned technology transfer initiative should enhance the global competitiveness of Canadian firms participating in collaborative research and innovation partnership.