A MEMS multi-spectral transducer array

提出的研究方案的目标是设计和制造一种基于MEMS的多光谱换能器阵列，该阵列能够同时产生和收集频谱的声学和微波部分的信息。在平面和非平面电容式微机械超声换能器(CMUT)阵列和基于MEMS的超宽带(UWB)微波雷达的基础上，将发展一种综合了非平面CMUT阵列和UWB MEMS雷达的多光谱换能器阵列。利用平面或非平面CMUT阵列的波束形成和波束导向能力的声学成像将识别目标区域中的物体或特征，而使用UWB雷达的微波成像将能够通过生成比仅使用超声成像技术获得的图像具有更高的分辨率和最佳深度的图像来查看物体或特征的内部。两种不同传感技术的微尺度融合将推动高分辨率3D成像的最先进水平，从而产生更低成本、更快、更小的设备和更高的成像能力。换能器阵列可用于各种应用中的非侵入性或非破坏性成像，例如医疗诊断成像、汽车防撞、材料表征以及基于生物测定的识别和安全目的。该换能器的同时声学和微波成像能力将在医疗诊断应用中提供许多优势，从而在更容易治愈和治疗成本更低的情况下更早地诊断医疗状况。这项研究的开展还将有助于培养一批高素质的人才(HQP)。计划中的技术转让倡议应能提高参与合作研究和创新伙伴关系的加拿大公司的全球竞争力。

The objective of the proposed research proposal is to design and fabricate a MEMS based multi-spectral transducer array that is capable of generating and gathering information concurrently in the acoustical and microwave portions of the spectrum. The state-of-the-art in planar and non-planar capacitive micromachined ultrasonic transducer (CMUT) array and MEMS based ultrawideband (UWB) microwave radar will be extended to develop a multi-spectral transducer array that integrates the capabilities of both the non-planar CMUT array and the UWB MEMS radar. While the acoustical imaging using the beamforming and beamsteering capability of the planar or non-planar CMUT array will identify an object or feature in the target area, the microwave imaging using the UWB radar will enable to look inside the object or the feature by generating an image with a much higher resolution and optimum depth compared to that obtained if only the ultrasonic imaging technique is used. A microscale fusion of two different transduction technologies will advance the state-of-the-art in high resolution 3-D imaging that will result in lower cost faster smaller equipment with a higher imaging capability. The transducer array can be used for non-intrusive or non-destructive imaging in diverse applications such as medical diagnostic imaging, automotive collision avoidance, material characterization, and for biometric based identification and security purposes. The transducer's simultaneous acoustical and microwave imaging capability will offer many advantages in medical diagnostic applications that will lead to the earlier diagnosis of medical conditions when they are more readily curable and less costly to treat. The conduct of the research will also contribute to the development of a number of highly qualified persons (HQP). The planned technology transfer initiative should enhance the global competitiveness of Canadian firms participating in collaborative research and innovation partnership.