Millimeter-wave electro-optical waveguide modulators based on calcium-barium-niobate thin-film

高速（10ghz）集成电光（EO）调制器的发展具有改进的性能（例如降低工作电压和相关的更低功耗，以及更高速度的潜力），代表了未来光通信系统和片上光信号处理系统中超宽带信息调制的根本一步。为了克服当前EO调制器技术的局限性，必须解决两个主要问题：(i)开发具有高EO系数的新型热稳定材料，同时提供集成能力；（ii）研究可使用高达数百GHz的新设计概念（即衬底集成电路或sic）。在这个项目中，我们建议解决这两个科学和工程挑战。利用一种新的薄膜材料，铌酸钡钙（CBN），以及基于衬底集成波导（SIW）结构的新的调制器设计概念，我们提出开发一种新型的集成相位和幅度EO调制器，其工作频率可达数百GHz。我们的具体目标是：(i)优化CBN薄膜的光学和微波特性，（ii）设计和分析基于CBN的相位和幅度EO调制器，以及（iii）制造和优化基于CBN的相位和幅度EO调制器。我们相信，这里提出的新概念是对集成光子学核心器件进步的世界级贡献。这个多学科项目建立在INRS-EMT， Ecole Polytechnique和蒙特利尔大学三个研究团队的能力的全面结合之上，以满足独特的工业合作伙伴MPB Communications和O/E Land的兴趣。在高科技影响的领域培养1名硕士生，3名博士生和2名pdf。这项研究显然是竞争前的，但如果成功，它将为加拿大带来真正的好处，为高速和高容量通信提供新的解决方案。显然，这对加拿大各行业的未来需求具有战略重要性和相关性。

The development of high-speed (>tens of GHz) integrated electro-optical (EO) modulators with improved performance (e.g. reduced operation voltage and associated lower power consumption, and potential for even higher speeds) represents a fundamental step forward for extra-broadband information modulation in future optical telecommunication systems and on-chip optical signal processing systems. To overcome the limitations of the present EO modulator technology, two main issues have to be addressed: (i) development of new thermally stable materials with high EO coefficient that also provide the ability of being integrated and (ii) investigation of new design concept (i.e. Substrate Integrated Circuits or SICs) that could be used up to hundreds of GHz. In this project, we propose to address these two scientific and engineering challenges. Capitalizing on a new thin film material, Calcium Barium Niobate (CBN), as well as on the new modulator design concept based on Substrate-Integrated Waveguide (SIW) structure, we propose to develop a novel class of integrated phase and amplitude EO modulators that could operate up to hundreds of GHz. Our specific objectives are: (i) optimize the optical and microwave characteristics of CBN thin films, (ii) design and analyze CBN-based phase and amplitude EO modulators and (iii) fabricate and optimize CBN-based phase and amplitude EO modulators. We are convinced that the new concepts proposed here are world-class contributions to the advancement of devices that are at the heart of integrated photonics. This multidisciplinary project builds on a full combination of capabilities of three research teams at INRS-EMT, Ecole Polytechnique and University of Montreal towards the interest of unique industrial partners, MPB Communications and O/E Land. It will train 1 M.Sc. student, 3 PhD students and 2 PDFs in domains with high scientific and technological impact. The research is obviously precompetitive, but if successful, it will bring a real benefit to Canada by allowing new solutions for high-speed and high-capacity communications. Clearly, this presents strategic importance and relevance to the future needs of various Canadian industries.