Synthesis of New Precursors for Cobalt and Group 13/15 Thin Films
Synthesis of New Precursors for Cobalt and Group 13/15 Thin Films
批准号:
505346-2016
负责人:
Song, Datong
金额:
$5.77万
依托单位:
依托单位国家:
加拿大
项目类别:
Collaborative Research and Development Grants
财政年份:
2017
资助国家:
加拿大
项目状态:
已结题
起止时间:
2017-01-01 至 2018-12-31
中文摘要
高质量的金属钴薄膜在微电子和磁阻器件中得到了应用,而13-15族材料的高质量薄膜在光电子学中具有重要的意义。这种薄膜的制备依赖于合适的化学前驱体。拟议的研究涉及开发用于金属钴和13-15族薄膜形成的新前驱体。
英文摘要
High quality metallic cobalt thin films have found applications in microelectronic and magnetoresistive devices, while high quality thin films of Group 13-15 materials are important for optoelectronics. The fabrication of such thin films replies on suitable chemical precursors. The proposed research is concerned with the development of new precursors for cobalt metal and Group 13-15 thin film formations.
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