Acquisition of a Multi-Purpose, Multi-User Mask Aligner

购买多用途、多用户掩模对准器

• 批准号: 9912490
• 负责人: Yue Kuo
• 金额: $ 7.84万
• 依托单位: Texas A&M Engineering Experiment Station
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-06-01 至 2001-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9912490&HistoricalAwards=false
• 关键词: Acquisition; Multi; Purpose; User; Mask

The mask aligner is a critical equipment for interdisciplinary researches that require the definition of small-geometry patterns precisely and repeatedly. This proposal is for the acquisition of a state-of-the-art contact/proximity mask aligner for multi-purpose, multi-user researches and education. In addition to conventional exposure and alignment functions, this equipment has the following capabilities: 1) a wide wavelength range of exposure light for resolution requirements, 2) holding varieties types and sizes of substrates for miscellaneous applications, and 3) maintaining constant light intensity for the consistent operation condition. This mask aligner is used by three research groups in microelectronics, biotechnology, and polymer science. Totally, seventeen graduate students, four undergraduate students, and one post doctoral scholar utilize this equipment for research. The aligner is also an educational tool for new courses, undergraduate or short-term research. Students from diversified backgrounds have been involved in these activities recently. This mask aligner expands research capabilities of other groups in science and engineering fields in the Texas A&M University.The mask aligner is located in the recently upgraded Thin Film Microelectronic Research Laboratory. The university cost-shared 33% of the equipment price as well as complete shipping and installation/training expenses. The equipment's annual maintenance cost is supplied by PI's and co-PIs' other research grants.

掩模对准器是跨学科研究的关键设备，需要精确和重复地定义小几何图案。这项提议是为了购买最先进的接触式/接近面罩对准器，用于多用途、多用户的研究和教育。除了传统的曝光和对准功能外，该设备还具有以下功能：1)满足分辨率要求的宽波长曝光范围；2)保持各种类型和尺寸的基板，以满足各种应用；以及3)保持恒定的光强度，以保持一致的操作条件。微电子、生物技术和聚合物科学领域的三个研究小组都在使用这种掩模对准器。共有17名研究生、4名本科生和1名博士后利用这台设备进行研究。Aligner也是新课程、本科生或短期研究的教育工具。最近，来自不同背景的学生都参与了这些活动。这种掩模对准器扩展了德克萨斯农工大学科学和工程领域的其他小组的研究能力。掩模对准器位于最近升级的薄膜微电子研究实验室。该大学分担设备价格的33%，以及完整的运输和安装/培训费用。设备的年度维护费用由私人投资公司和合作投资公司的其他研究补助金提供。