Acquisition of a Multi-Purpose, Multi-User Mask Aligner

掩模对准器是用于需要精确和重复地定义小几何图案的跨学科研究的关键设备。该提案是为了获得一种最先进的接触/接近掩模对准器，用于多用途，多用户研究和教育。除了传统的曝光和对准功能外，该设备还具有以下功能：1）满足分辨率要求的宽波长范围的曝光光; 2）支持各种类型和尺寸的基片，用于各种应用; 3）保持恒定的光强度，用于一致的操作条件。 这种掩模对准器被微电子学、生物技术和聚合物科学的三个研究小组使用。共有17名研究生、4名本科生和1名博士后利用该设备进行研究。校准器也是新课程，本科或短期研究的教育工具。来自不同背景的学生最近参与了这些活动。这个掩模对准器扩展了德克萨斯A M大学科学和工程领域其他小组的研究能力。掩模对准器位于最近升级的薄膜微电子研究实验室。该大学分担了33%的设备价格以及全部运输和安装/培训费用。设备的年度维护费用由PI和共同PI的其他研究赠款提供。

The mask aligner is a critical equipment for interdisciplinary researches that require the definition of small-geometry patterns precisely and repeatedly. This proposal is for the acquisition of a state-of-the-art contact/proximity mask aligner for multi-purpose, multi-user researches and education. In addition to conventional exposure and alignment functions, this equipment has the following capabilities: 1) a wide wavelength range of exposure light for resolution requirements, 2) holding varieties types and sizes of substrates for miscellaneous applications, and 3) maintaining constant light intensity for the consistent operation condition. This mask aligner is used by three research groups in microelectronics, biotechnology, and polymer science. Totally, seventeen graduate students, four undergraduate students, and one post doctoral scholar utilize this equipment for research. The aligner is also an educational tool for new courses, undergraduate or short-term research. Students from diversified backgrounds have been involved in these activities recently. This mask aligner expands research capabilities of other groups in science and engineering fields in the Texas A&M University.The mask aligner is located in the recently upgraded Thin Film Microelectronic Research Laboratory. The university cost-shared 33% of the equipment price as well as complete shipping and installation/training expenses. The equipment's annual maintenance cost is supplied by PI's and co-PIs' other research grants.