MRI: Acquisition of an E-beam Lithography System for Nanoscale Science and Engineering

该奖项来自主要研究仪器项目，支持辛辛那提大学获得电子束光刻系统：Raith-150。来自南俄亥俄州6所主要大学的物理系、电气工程系、光电子学和材料科学系的15个跨学科小组将使用该仪器。该仪器将为尺寸小于10nm的纳米结构的纳米制造提供基础，将支持纳米电子学、光子和电子纳米结构、纳米生物电子学和新型显微镜等领域的研究。这些领域的进展关键取决于Raith-150系统提供的纳米制造能力。在纳米电子学（如纳米输运实验）、光子纳米结构（如强耦合量子点系统）、纳米生物电子学（如生物芯片和光学集成电路）等技术相关领域有望取得新的和具有挑战性的进展，以及为研究人员开发的新工具（如新型显微镜）。该活动的一个关键部分是对本科生、研究生和博士后进行电子束光刻现代方法的教育和培训。该奖项来自主要研究仪器项目，支持辛辛那提大学获得电子束光刻系统：Raith-150。来自南俄亥俄州6所主要大学的物理系、电气工程系、光电子学和材料科学系的15个跨学科小组将使用该仪器。该仪器将为尺寸小于10nm的纳米结构的纳米制造提供基础，将支持纳米电子学、光子和电子纳米结构、纳米生物电子学和新型显微镜等领域的研究。这些领域的进展关键取决于Raith-150系统提供的纳米制造能力。在纳米电子学（如纳米输运实验）、光子纳米结构（如强耦合量子点系统）、纳米生物电子学（如生物芯片和光学集成电路）等技术相关领域有望取得新的和具有挑战性的进展，以及为研究人员开发的新工具（如新型显微镜）。该活动的一个关键部分是对本科生、研究生和博士后进行电子束光刻现代方法的教育和培训。

This award from the Major Research Instrumentation program supports the University of Cincinnati with the acquisition of an e-beam lithography system: the Raith-150. Fifteen interdisciplinary group of faculty from departments of physics, electrical engineering, optoelectronics, and materials science representing the 6 major universities in Southern Ohio will make use of the instrument. The instrument, which will provide the foundation for nanofabrication of structures with sizes down to 10 nm, will support research in the areas of Nanoelectronics, Photonic and Electronic Nanostructures, Nano BioElectronics, and Novel Microscopies. Advances in each of these areas depend crucially on the ability to carry out the nanofabrication provided by the Raith-150 system. New fundamental understanding will result from the work on nanoelectronics (e.g.nanotransport experiments), photonic nanostructures (e.g. strongly coupled quantum dots systems), new and challenging advances is expected in technologically relevant areas including nano bio-electronics (e.g. biochips and optical integrated circuits), and new tools for researchers will be developed (e.g. novel microscopies). A key part of the activity is the education and training of undergraduates, graduate students, and post-doctoral fellows in modern methods of e-beam lithography. This award from the Major Research Instrumentation program supports the University of Cincinnati with the acquisition of an e-beam lithography system: the Raith-150. Fifteen interdisciplinary group of faculty from departments of physics, electrical engineering, optoelectronics, and materials science representing the 6 major universities in Southern Ohio will make use of the instrument. The instrument, which will provide the foundation for nanofabrication of structures with sizes down to 10 nm, will support research in the areas of Nanoelectronics, Photonic and Electronic Nanostructures, Nano BioElectronics, and Novel Microscopies. Advances in each of these areas depend crucially on the ability to carry out the nanofabrication provided by the Raith-150 system. New fundamental understanding will result from the work on nanoelectronics (e.g.nanotransport experiments), photonic nanostructures (e.g. strongly coupled quantum dots systems), new and challenging advances is expected in technologically relevant areas including nano bio-electronics (e.g. biochips and optical integrated circuits), and new tools for researchers will be developed (e.g. novel microscopies). A key part of the activity is the education and training of undergraduates, graduate students, and post-doctoral fellows in modern methods of e-beam lithography.