MRI: Acquisition of an E-beam Lithography System for Nanoscale Science and Engineering

MRI：获取用于纳米科学与工程的电子束光刻系统

• 批准号: 0216374
• 负责人: Leigh Smith
• 金额: $ 40.7万
• 依托单位: University of Cincinnati Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2002
• 资助国家: 美国
• 起止时间: 2002-08-15 至 2006-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0216374&HistoricalAwards=false
• 关键词: MRI; Acquisition; beam; Lithography; System

This award from the Major Research Instrumentation program supports the University of Cincinnati with the acquisition of an e-beam lithography system: the Raith-150. Fifteen interdisciplinary group of faculty from departments of physics, electrical engineering, optoelectronics, and materials science representing the 6 major universities in Southern Ohio will make use of the instrument. The instrument, which will provide the foundation for nanofabrication of structures with sizes down to 10 nm, will support research in the areas of Nanoelectronics, Photonic and Electronic Nanostructures, Nano BioElectronics, and Novel Microscopies. Advances in each of these areas depend crucially on the ability to carry out the nanofabrication provided by the Raith-150 system. New fundamental understanding will result from the work on nanoelectronics (e.g.nanotransport experiments), photonic nanostructures (e.g. strongly coupled quantum dots systems), new and challenging advances is expected in technologically relevant areas including nano bio-electronics (e.g. biochips and optical integrated circuits), and new tools for researchers will be developed (e.g. novel microscopies). A key part of the activity is the education and training of undergraduates, graduate students, and post-doctoral fellows in modern methods of e-beam lithography. This award from the Major Research Instrumentation program supports the University of Cincinnati with the acquisition of an e-beam lithography system: the Raith-150. Fifteen interdisciplinary group of faculty from departments of physics, electrical engineering, optoelectronics, and materials science representing the 6 major universities in Southern Ohio will make use of the instrument. The instrument, which will provide the foundation for nanofabrication of structures with sizes down to 10 nm, will support research in the areas of Nanoelectronics, Photonic and Electronic Nanostructures, Nano BioElectronics, and Novel Microscopies. Advances in each of these areas depend crucially on the ability to carry out the nanofabrication provided by the Raith-150 system. New fundamental understanding will result from the work on nanoelectronics (e.g.nanotransport experiments), photonic nanostructures (e.g. strongly coupled quantum dots systems), new and challenging advances is expected in technologically relevant areas including nano bio-electronics (e.g. biochips and optical integrated circuits), and new tools for researchers will be developed (e.g. novel microscopies). A key part of the activity is the education and training of undergraduates, graduate students, and post-doctoral fellows in modern methods of e-beam lithography.

这项来自重大研究仪器计划的奖项支持辛辛那提大学购买电子束光刻系统：RAITH-150。来自南俄亥俄州6所主要大学的物理、电气工程、光电子学和材料科学系的15个跨学科教员小组将使用该仪器。该仪器将为尺寸小于10纳米的结构的纳米制造提供基础，将支持纳米电子学、光子和电子纳米结构、纳米生物电子学和新型显微镜领域的研究。这些领域的进展主要取决于RAITH-150系统提供的纳米制造的能力。纳米电子学(例如纳米传输实验)、光子纳米结构(例如强耦合量子点系统)的工作将产生新的基本理解，包括纳米生物电子学(例如生物芯片和光学集成电路)在内的相关技术领域有望取得新的和具有挑战性的进展，并将为研究人员开发新的工具(例如新型显微镜)。活动的一个关键部分是对本科生、研究生和博士后研究员进行现代电子束光刻方法的教育和培训。这项来自重大研究仪器计划的奖项支持辛辛那提大学购买电子束光刻系统：RAITH-150。来自南俄亥俄州6所主要大学的物理、电气工程、光电子学和材料科学系的15个跨学科教员小组将使用该仪器。该仪器将为尺寸小于10纳米的结构的纳米制造提供基础，将支持纳米电子学、光子和电子纳米结构、纳米生物电子学和新型显微镜领域的研究。这些领域的进展主要取决于RAITH-150系统提供的纳米制造的能力。纳米电子学(例如纳米传输实验)、光子纳米结构(例如强耦合量子点系统)的工作将产生新的基本理解，包括纳米生物电子学(例如生物芯片和光学集成电路)在内的相关技术领域有望取得新的和具有挑战性的进展，并将为研究人员开发新的工具(例如新型显微镜)。活动的一个关键部分是对本科生、研究生和博士后研究员进行现代电子束光刻方法的教育和培训。