In Situ Nanomanufacturing Process Control Through Multiscale Nanostructure Growth Modeling

这项研究的目的是通过多尺度纳米结构生长模型和具有优异光学性能的金属氧化物纳米线的生长来产生原位纳米制造过程控制的知识。标准的统计质量控制(SQC)面临着尺度效应的新挑战，这是纳米制造过程中质量控制所独有的。特别是，在宏观/微观尺度上测量随位置和时间变化的关键工艺变量。纳米结构的质量特征最好用纳米尺度测量的时空随机场来描述。将宏观过程变量与纳米尺度的关键质量特征和缺陷联系起来，需要多尺度模型集成以实现现场过程控制。因此，这项研究的目的是模拟纳米制造过程，更具体地说，纳米结构生长，以用于纳米制造中的原位质量控制。基于这一目标，我们提出了一项跨学科的研究计划，包括：(1)通过将时空随机场模型与纳米结构生长机制相结合来模拟纳米结构的产生和生长过程；(2)通过对衬底之间生长速率差异的宏观建模和对单个衬底内局部均匀区域生长速率差异的纳米尺度建模来多尺度原位控制纳米结构的生长；(3)控制生长具有良好光学性能的新型金属氧化物纳米线。这项实验工作将为纳米结构生长过程的多尺度建模提供数据。所提出的工作可能是第一次通过对纳米结构生长过程的多尺度建模来控制纳米制造过程的质量。成功完成拟议的研究可能有助于加快以较低成本将快速发展的纳米技术从实验室转移到工业应用。提出的金属氧化物纳米线制备研究将为新型纳米器件提供有前景的构建块。新一代纳米制造工程师将通过综合教育计划接受教育。

The objective of the proposed research is to generate knowledge of in situ nanomanufacturing process control through multiscale nanostructure growth modeling and growth of metal-oxide nanowires with excellent optical properties. Standard statistical quality control (SQC) faces new challenges of scale effects which is unique to quality control of nanofabrication processes. Particularly, key process variables, varying with location and time, are measured at macro/micro scales. The quality characteristics of nanostructures would better be characterized as space-time random field measured in nanoscale. Relating macroscale process variables to nanoscale critical quality characteristics and defects requires multiscale model integration for in situ process control. The research therefore aims to model nanofabrication process, more specifically, nanostructure growth for in situ quality control in nanomanufacturing. Novel metal-oxide nanowires will be synthesized and characterized for wide applications in nanoscale electronic and optoelectronic devices.Toward this goal, we propose an interdisciplinary research plan including: (1) modeling of nanostructure birth and growth processes by integrating space-time random field models with nanostructure growth mechanisms, (2) multiscale in situ quality control of nanostructure growth through macroscale modeling of growth rate difference between substrates and nanoscale modeling of growth rate difference between locally homogeneous regions within individual substrates, and (3) controlled growth of novel metal-oxide based nanowires with excellent optical properties. The experimental work will provide data for multiscale modeling of nanostructure growth processes.The proposed work is probably the first of its kind to control nanomanufacturing process quality through multiscale modeling of nanostructure growth processes. Successful completion of the proposed research may assist to expedite the transfer of fast-developing nanotechnology from the laboratory to industry application at lower cost. The proposed metal oxide nanowire fabrication research will provide promising building blocks for novel nano devices. A new breed of nanomanufacturing engineers will be educated through an integrated education plan.