In Situ Nanomanufacturing Process Control Through Multiscale Nanostructure Growth Modeling

该研究的目的是通过多尺度纳米结构生长模型和具有优异光学性能的金属氧化物纳米线的生长来获得原位纳米制造过程控制的知识。标准统计质量控制（SQC）面临着纳米加工过程质量控制所特有的尺度效应的新挑战。特别是，关键的过程变量，随着地点和时间的变化，在宏观/微观尺度上进行测量。纳米结构的质量特性最好用在纳米尺度上测量的时空随机场来表征。将宏观尺度的工艺变量与纳米尺度的关键质量特征和缺陷联系起来，需要多尺度模型集成来进行现场过程控制。因此，该研究旨在模拟纳米制造过程，更具体地说，纳米结构生长用于纳米制造的原位质量控制。新型金属氧化物纳米线将在纳米级电子和光电子器件中得到广泛的应用。为此，我们提出跨学科研究计划，包括：(1)将时空随机场模型与纳米结构生长机制相结合，对纳米结构的诞生和生长过程进行建模；(2)通过对衬底之间生长速率差异的宏观建模和对单个衬底内部局部均匀区域生长速率差异的纳米尺度建模，对纳米结构生长进行多尺度原位质量控制；(3)对具有优异光学性能的新型金属氧化物纳米线的生长进行控制。实验工作将为纳米结构生长过程的多尺度建模提供数据。这项工作可能是第一个通过纳米结构生长过程的多尺度建模来控制纳米制造过程质量的研究。建议的研究如能顺利完成，将有助加快以较低成本把发展迅速的纳米科技从实验室转移到工业应用。提出的金属氧化物纳米线制造研究将为新型纳米器件提供有前途的构建模块。将通过综合教育计划培养新型纳米制造工程师。

The objective of the proposed research is to generate knowledge of in situ nanomanufacturing process control through multiscale nanostructure growth modeling and growth of metal-oxide nanowires with excellent optical properties. Standard statistical quality control (SQC) faces new challenges of scale effects which is unique to quality control of nanofabrication processes. Particularly, key process variables, varying with location and time, are measured at macro/micro scales. The quality characteristics of nanostructures would better be characterized as space-time random field measured in nanoscale. Relating macroscale process variables to nanoscale critical quality characteristics and defects requires multiscale model integration for in situ process control. The research therefore aims to model nanofabrication process, more specifically, nanostructure growth for in situ quality control in nanomanufacturing. Novel metal-oxide nanowires will be synthesized and characterized for wide applications in nanoscale electronic and optoelectronic devices.Toward this goal, we propose an interdisciplinary research plan including: (1) modeling of nanostructure birth and growth processes by integrating space-time random field models with nanostructure growth mechanisms, (2) multiscale in situ quality control of nanostructure growth through macroscale modeling of growth rate difference between substrates and nanoscale modeling of growth rate difference between locally homogeneous regions within individual substrates, and (3) controlled growth of novel metal-oxide based nanowires with excellent optical properties. The experimental work will provide data for multiscale modeling of nanostructure growth processes.The proposed work is probably the first of its kind to control nanomanufacturing process quality through multiscale modeling of nanostructure growth processes. Successful completion of the proposed research may assist to expedite the transfer of fast-developing nanotechnology from the laboratory to industry application at lower cost. The proposed metal oxide nanowire fabrication research will provide promising building blocks for novel nano devices. A new breed of nanomanufacturing engineers will be educated through an integrated education plan.