In Situ Nanomanufacturing Process Control Through Multiscale Nanostructure Growth Modeling

通过多尺度纳米结构生长建模进行原位纳米制造过程控制

• 批准号: 1002580
• 负责人: Qiang Huang
• 金额: $ 23.76万
• 依托单位: University of Southern California
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-08-06 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1002580&HistoricalAwards=false
• 关键词: Situ; Nanomanufacturing; Process; Control; Through

The objective of the research is to generate knowledge of in situ nanomanufacturing process control through multiscale nanostructure growth modeling and growth of metal-oxide nanowires with excellent optical properties. Standard statistical quality control (SQC) faces new challenges of scale effects which is unique to quality control of nanofabrication processes. Particularly, key process variables, varying with location and time, are measured at macro/micro scales. The quality characteristics of nanostructures would better be characterized as space-time random field measured in nanoscale. Relating macroscale process variables to nanoscale critical quality characteristics and defects requires multiscale model integration for in situ process control. The research therefore aims to model nanofabrication process, more specifically, nanostructure growth for in situ quality control in nanomanufacturing. Novel metal-oxide nanowires will be synthesized and characterized for wide applications in nanoscale electronic and optoelectronic devices.Toward this goal, we plan an interdisciplinary research plan including: (1) modeling of nanostructure birth and growth processes by integrating space-time random field models with nanostructure growth mechanisms, (2) multiscale in situ quality control of nanostructure growth through macroscale modeling of growth rate difference between substrates and nanoscale modeling of growth rate difference between locally homogeneous regions within individual substrates, and (3) controlled growth of novel metal-oxide based nanowires with excellent optical properties. The experimental work will provide data for multiscale modeling of nanostructure growth processes.This work is probably the first of its kind to control nanomanufacturing process quality through multiscale modeling of nanostructure growth processes. Successful completion of the research may assist to expedite the transfer of fast-developing nanotechnology from the laboratory to industry application at lower cost. The metal oxide nanowire fabrication research will provide promising building blocks for novel nano devices. A new breed of nanomanufacturing engineers will be educated through an integrated education plan.

该研究的目的是通过多尺度纳米结构生长建模和具有优异光学性能的金属氧化物纳米线的生长来产生原位纳米制造过程控制的知识。标准统计质量控制（SQC）面临着尺度效应的新挑战，这是纳米纤维加工过程质量控制所特有的。特别是，关键的过程变量，随着位置和时间的变化，在宏观/微观尺度上进行测量。纳米结构的质量特性可以用纳米尺度上的时空随机场来表征。将宏观过程变量与纳米级关键质量特性和缺陷相关联需要多尺度模型集成用于原位过程控制。因此，这项研究的目的是模拟纳米制造过程，更具体地说，纳米结构的生长在纳米制造的原位质量控制。新型金属氧化物纳米线的合成和表征将在纳米电子和光电子器件中得到广泛的应用。为了实现这一目标，我们计划进行跨学科的研究计划，包括：（1）通过将时空随机场模型与纳米结构生长机制相结合来模拟纳米结构的诞生和生长过程，（二）通过对衬底之间的生长速率差进行宏观尺度建模和对局部均匀区域之间的生长速率差进行纳米尺度建模的纳米结构生长的多尺度原位质量控制在单独的衬底内，以及（3）具有优异光学性质的新型金属氧化物基纳米线的受控生长。实验工作将为纳米结构生长过程的多尺度建模提供数据，这项工作可能是第一次通过纳米结构生长过程的多尺度建模来控制纳米制造过程质量。成功完成这项研究，将有助加快把发展迅速的纳米技术，以较低成本从实验室转移到工业应用。金属氧化物纳米线的制备研究将为新型纳米器件提供有前途的构建模块。新一代的纳米制造工程师将通过综合教育计划接受教育。