Investigation of the Metalorganic Vapor Phase Epitaxy of AlInN Semiconductors

AlInN 半导体金属有机气相外延的研究

• 批准号: 0907558
• 负责人: Patrick Kung
• 金额: $ 40.89万
• 依托单位: University of Alabama Tuscaloosa
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-08-01 至 2014-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0907558&HistoricalAwards=false
• 关键词: Investigation; Metalorganic; Vapor; Phase; Epitaxy

Technical. The project aims for fundamental understanding of the MOVPE (metallo-organic vapor phase expitaxy) epitaxial growth of Al1-xInxN compound semiconductors, by focusing on two primary aspects. The objective of one aspect is to demonstrate material quality and composition control through the use of a novel MOVPE reactor whose growth chamber has the ability to be reconfigured in-situ. Characterization of structural, optical and electrical properties will be an integral part of these studies. The objective of a second focus area is to investigate phase segregation phenomena in Al1-xInxN using a Local Electrode Atom Probe (LEAP), an instrumental tool enabling the identification of individual atoms and their location in a three-dimensional microstructure with near atomic resolution. Design of experiments and correlation between growth conditions and the resulting material properties are expected to yield greater fundamental understanding of material synthesis mechanisms.Non-Technical. The project addresses fundamental research issues in a topical area of electronic/photonic materials science having technological relevance. Societal benefits of the proposed research on AlInN materials can be very broad since the specific materials being studied could support applications such as all-weather radar, surveillance, reconnaissance, high speed wireless telecommunications and automotive radar for collision warning sensors. Students will acquire fundamental research and education skills as part of this project. Additionally, the scientific concepts underlying this project will be integrated into new courses that the PI and Co-PI are developing at both undergraduate and graduate levels. In order to broaden the participation from under-represented groups, the proposed activity will benefit from an HBCU Workshop at U. AL to reach science faculty members and educators from HBCUs, as well as a project entitled, "Broadening Participation Research Initiation Grants in Engineering" (BRIGE) program. Out-reach activities to local schools and general public will be carried out in conjunction with existing activities within the U. AL Center for Materials for Information Technology (MINT).

技术.该项目旨在通过关注两个主要方面，对Al 1-xInxN化合物半导体的MOVPE（金属有机气相外延）外延生长进行基本了解。一个方面的目的是通过使用新型MOVPE反应器来证明材料质量和组成控制，所述新型MOVPE反应器的生长室具有原位重新配置的能力。结构、光学和电学特性的表征将是这些研究的一个组成部分。第二个重点领域的目标是研究在Al 1-xInxN使用局部电极原子探针（LEAP），仪器工具，使识别单个原子和它们的位置在三维微观结构与近原子分辨率的相分离现象。实验设计和生长条件与材料性能之间的相关性有望对材料合成机制产生更深入的基本理解。非技术性。该项目解决了具有技术相关性的电子/光子材料科学主题领域的基础研究问题。对AlInN材料的拟议研究的社会效益可以非常广泛，因为正在研究的特定材料可以支持诸如全天候雷达、监视、侦察、高速无线通信和碰撞警告传感器的汽车雷达等应用。学生将获得基本的研究和教育技能作为该项目的一部分。此外，该项目的科学概念将被整合到PI和Co-PI正在开发的本科和研究生课程中。为了扩大代表性不足的群体的参与，拟议的活动将受益于在U。AL接触HBCU的科学教员和教育工作者，以及一个题为“扩大参与工程研究启动赠款”（BRIGE）计划的项目。对当地学校和公众的外展活动将与美国国内现有的活动一起进行。AL Center for Materials for Information Technology（MINT）