Clarifying the Photonic, Electronic, and Acoustic Characteristics of Quantum-sized Silicon for Functional Integration

量子尺寸硅的光子学、电子学和声学特性已经被研究，用于它们的表征和朝着功能集成的器件应用。研究结果及意义如下。(1)基于增强发光的光子器件的开发-通过退火与表面钝化的结合证实了效率和稳定性都有很大的提高，然后通过光激发-弛豫过程的分析清楚地检测到纳米硅中能量转移的证据。稳定的蓝光、光腔、光电导、纳米线和三维周期性纳米结构的工艺技术作为硅光子学的组成部分得到了发展。(2)弹道式电子发射器的应用-纳米硅弹道式电子发射器作为负离子源和氢气产生装置的有用性分别通过在空气和纯水中的操作来显示。在真空中的适用性也被证明作为平面冷阴极的平行电子束光刻和超高灵敏度的图像传感。(3)改进的超声波发射和器件应用-在系统分析的基础上，开发了与纳米硅器件的高效和稳定的超声波发射兼容的适当设计和驱动技术。由于纳米硅发射器具有平坦的频率响应，因此它被成功地应用于生物声通信和数字信息传输研究的声源。(4)功能集成的实现-给出了在硅衬底上实现光子、电子和声学功能单片集成的器件概念和工艺流程。该方法的现状通过两种器件的原型：声发射电致发光二极管和具有弹道激发机制的表面发射器件来证明。

Photonic, electronic, and acoustic properties of quantum-sized silicon have been studied for their characterizations and device applications toward the functional integration. The results and significances are summarized as follows.(1) Development of photonic devices based on enhanced luminescence- It was confirmed by combination of anneal with surface passivation that both the efficiency and the stability were much improved, and then the evidence of energy transfer in nanosilicon was clearly detected by analyses of photoexcitation-relaxation process.- Process technologies for stable blue luminescence, optical cavity, photoconduction, nanowire, and 3-dimensional periodic nanostructure were developed as components of silicon photonics.(2) Applications of ballistic electron emitter- The usefulness of nanosilicon ballistic electron emitter as means of negative ion source and hydrogen gas generation was shown by operation in air and in pure water, respectively.- The applicability in vacuum was also demonstrated by the use as planar cold cathode for parallel electron-beam lithography and ultra-high-sensitivity image sensing.(3) Improved ultrasonic emission and device applications- The appropriate design and driving techniques compatible with efficient and stable ultrasonic emission from nanosilicon device were developed on a basis of systematic analyses.- Due to the flat frequency response, the nanosilicon emitter was successfully applied to sound source for studies on bio-acoustic communication and digital information transmission.(4) Implementation of functional integration- The device concept and process flow were given for monolithic integration of photonic, electronic, and acoustic functions into silicon substrate.- Actuality of this approach was demonstrated by prototyping two devices : sound-emissive electroluminescent diode and surface-emitting device with ballistic excitation mechanism.