Clarifying the Photonic, Electronic, and Acoustic Characteristics of Quantum-sized Silicon for Functional Integration

量子硅的光子、电学和声学特性已被研究用于功能集成的表征和器件应用。研究结果和意义概括如下：(1)基于增强发光的光子器件的研制--通过退火和表面钝化相结合的方法，证实了效率和稳定性都得到了很大的提高，然后通过对光激发-弛豫过程的分析，清楚地检测到了纳米硅中能量转移的证据。-开发了稳定的蓝色发光、光学腔、光导、纳米线和三维周期性纳米结构的工艺技术，作为硅光子学的组成部分。(2)弹道电子发射器的应用-通过在空气和纯水中的运行，展示了纳米硅弹道电子发射器作为负离子源和氢气产生的有效性，(3)改进了超声发射和器件的应用--在系统分析的基础上，开发了与纳米硅器件高效稳定的超声波发射兼容的适当设计和驱动技术。-由于频率响应平坦，纳米硅发射器成功地应用于声源，用于生物声通信和数字信息传输的研究。(4)功能集成的实现--给出了光子、电子、并通过两种器件：声发射电致发光二极管和具有弹道激励机制的表面发射器件的原型验证了这种方法的现状。

Photonic, electronic, and acoustic properties of quantum-sized silicon have been studied for their characterizations and device applications toward the functional integration. The results and significances are summarized as follows.(1) Development of photonic devices based on enhanced luminescence- It was confirmed by combination of anneal with surface passivation that both the efficiency and the stability were much improved, and then the evidence of energy transfer in nanosilicon was clearly detected by analyses of photoexcitation-relaxation process.- Process technologies for stable blue luminescence, optical cavity, photoconduction, nanowire, and 3-dimensional periodic nanostructure were developed as components of silicon photonics.(2) Applications of ballistic electron emitter- The usefulness of nanosilicon ballistic electron emitter as means of negative ion source and hydrogen gas generation was shown by operation in air and in pure water, respectively.- The applicability in vacuum was also demonstrated by the use as planar cold cathode for parallel electron-beam lithography and ultra-high-sensitivity image sensing.(3) Improved ultrasonic emission and device applications- The appropriate design and driving techniques compatible with efficient and stable ultrasonic emission from nanosilicon device were developed on a basis of systematic analyses.- Due to the flat frequency response, the nanosilicon emitter was successfully applied to sound source for studies on bio-acoustic communication and digital information transmission.(4) Implementation of functional integration- The device concept and process flow were given for monolithic integration of photonic, electronic, and acoustic functions into silicon substrate.- Actuality of this approach was demonstrated by prototyping two devices : sound-emissive electroluminescent diode and surface-emitting device with ballistic excitation mechanism.