Control of physical properties induced in silicon nanostructure and device applications

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The physical properties induced in quantum-sized silicon have been studied, including their applications. Major results are summarized as follows.(1) Luminescence: The blue emission was enhanced by high quality oxidation, and then bluephosphorescence was generated. As a related photonic effect, avalanche photoconduction was observed.(2) Ballistic electron emission: The usefulness has been confirmed in various media: parallel EBlithography and highly sensitive image-pickup in vacuum, VUV light emission in atmospheric pressureXe gas ambience, and hydrogen gas generation and thin solid film deposition in solutions.(3) Sound emission: It was demonstrated that the emitter is compatible with the use as 3-D objectsensing probe, non-contact actuator, digital speaker, and bio-acoustic communication.