Development and Photonic Integration of Efficient and Stable Silicon-Based LED

高效稳定硅基LED的开发与光子集成

• 批准号: 10355015
• 负责人: KOSHIDA Nobuyoshi
• 金额: $ 15.68万
• 依托单位: Tokyo University of Agriculture & Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (A)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10355015/
• 关键词: porous silicon; nanocrystalline silicon; quantum confinement; visible luminescence; silicon LED; quantum efficiency; optical wave guide; photonic integration; 量子効率

To develop efficient and stable silicon-based LED and make the technological foundation of monolithic photonic integration more solid, experimental studies have been conducted in terms of fabrication technique, surface passivation, and related optoelectronic characterization. The major results and their significances are summarized as follows.1. Drastic improvement in the efficiency of Si-based LEDsBy introducing a post-anodization electrochemical treatment, the leakage component in the porous silicon diode current is successfully reduced, and carrier injection into luminescent nanocrystalline silicon becomes very efficient. As a result, the external quantum efficiency is enhanced to beyond 1%. Also, an external power efficiency of 0.4% close to a practical level can be obtained from a diode with an appropriate device configuration. These are the highest values to date in this field. Some key issues for stabilization of LED operation and for tuning the emission band have also been clarified. Especially important result is that blue emission has been observed with oxide-free samples.2. Findings of novel functions of silicon nanocrystalsFrom some electrical and optical investigations, it has been shown that luminescent nanocrystalline silicon exhibits various useful functions : light-emissive nonvolatile memory, ballistic electron emission, and thermally induced ultrasonic emission. Nanocrystalline silicon is very useful as a multi-functional material.3. Toward photonic integrationThe compatibility of nanocrystalline silicon with three-dimensional buried optical waveguide was examined. It has been demonstrated that a buried bent waveguide with an extremely small curvature can be fabricated by simple palanar processing. Nonlinear optical effects due to refractive index change were also observed.

为了开发高效、稳定的硅基LED，使单片光子集成的技术基础更加坚实，从制造工艺、表面钝化以及相关光电表征等方面进行了实验研究。主要研究结果及意义如下： 1．硅基LED效率的大幅提高通过引入阳极氧化后电化学处理，成功减少了多孔硅二极管电流中的泄漏分量，并且载流子注入发光纳米晶硅变得非常有效。结果，外量子效率提高到1%以上。此外，通过具有适当器件配置的二极管可以获得接近实用水平的0.4%的外部功率效率。这些是该领域迄今为止的最高值。 LED 工作稳定性和发射波段调整的一些关键问题也已得到澄清。特别重要的结果是，在不含氧化物的样品中观察到蓝色发射。2．硅纳米晶体新功能的发现一些电学和光学研究表明，发光纳米晶体硅表现出各种有用的功能：发光非易失性存储器、弹道电子发射和热致超声波发射。纳米晶硅作为一种非常有用的多功能材料。 3．面向光子集成研究了纳米晶硅与三维埋入式光波导的兼容性。已经证明，可以通过简单的平面加工来制造具有极小曲率的埋地弯曲波导。还观察到由于折射率变化引起的非线性光学效应。

项目成果

T.Komoda,X.Sheng,and N.Koshida: "Mechanism of efficient and stable surface-emitting cold cathode based on porous poly-crystalline silicon films"J.Vac.Sci.Technol.B. 17. 1076-1079 (1999)

T.Komoda、X.Sheng、N.Koshida：“基于多孔多晶硅薄膜的高效稳定面发射冷阴极机理”J.Vac.Sci.Technol.B。

X. Sheng, A. Kojima, T. Komoda, and N. Koshida: "Efficient and ballistic cold electron emission from porous poly-crystalline silicon diodes with a porosity multilayer structure"J. Vac. Sci. Tecnol. B. 18(in press). (2000)

X. Shen、A. Kojima、T. Komoda 和 N. Koshida：“具有多孔多层结构的多孔多晶硅二极管的高效弹道冷电子发射”J。

B.Gelloz,T.Nakagawa,and N.Koshida: "Enhancing the external quantum efficiency of porous silicon LEDs beyond 1% by a post-anodization electrochemical oxidation" Mat.Res.Soc.Symp.Proc.536(in press). (1999)

B.Gelloz、T.Nakakawa 和%20N.Koshida：%20"增强%20the%20external%20quantum%20efficiency%20of%20porous%20silicon%20LEDs%20beyond%201%%20by%20a%20post-anodization%20电化学%

T. Matsumoto, H. Mimura, N. Koshida, and Y. Masumoto: "The density of states in silicon nanostructures determined by space-charge-limited current measurements"J. Appl. Phys.. 84. 6157-6161 (1998)

T. Matsumoto、H. Mimura、N. Koshida 和 Y. Masumoto：“通过空间电荷限制电流测量确定硅纳米结构中的态密度”J。

B.Gelloz,T.Nakagawa,and N.Koshida: "Enhancement of the quantum efficiency and stability of electroluminescence from porous silicon by anodic passivation." Appl.Phys.Lett.73. 2021-2023 (1998)

B.Gelloz、T.Nakakawa 和 N.Koshida：“通过阳极钝化提高多孔硅电致发光的量子效率和稳定性。”