Research of High-Efficiency Silicon-Based Light-Emitting Devices
Research of High-Efficiency Silicon-Based Light-Emitting Devices
批准号:
04555085
负责人:
MATSUMURA Masakiyo
金额:
$10.5万
依托单位国家:
日本
项目类别:
Grant-in-Aid for Developmental Scientific Research (B)
财政年份:
1992
资助国家:
日本
项目状态:
已结题
起止时间:
1992 至 1994
中文摘要
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英文摘要
Electronic structures are investigated for Si/Ge manmade crystals using an sps^* tight binding model. For the crystal stacked with two monolayrs of Si and Ge, wavefunction of electrons at the GAMMA point is very similar to that at the L point in bulk Ge, and thus the energy takes the local minimum in the conduction band at the GAMMA point. By elongating the bond length, the crystal takes the direct-transition type structure.This crystal, having potentially visible light emission characteristics, is difficult to be formed by conventional epitaxial methods based on random chemisorption of atoms. Thus an atomic layr epitaxy (ALE) method has been investigated where the crystal is grown with a layr-by-layr manner. The Si-ALE method has been achieved using newly introduced atomic hydrogen and SiH_2Cl_2, for the first time, with an ideal (one monolayr per cycle) growth rate. And the Ge-ALE with the ideal growth rate has been also demonstrated by alternative exposure to atomic hydrogen and GeH_2 (CH_3) _2 for a wide temperature range from 400゚C to 518゚C.Ge- and Si- hetero ALEs, i.e., growth of Ge on Si and that of Si on Ge, has been investigated for making the manmade crystals. As for the former, there was a problem that the surface is covered by Ge of one monolayr. As for the latter, there was a problem that a lot of carbon atoms are adsorbed on the surface.
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今井茂他: "Atomic Layer Epitaxy of Si Using Atomic H" Thin Solid Films. 225. 168-172 (1993)
Shigeru Imai 等人:“使用原子 H 进行硅的原子层外延”薄固体薄膜。225. 168-172 (1993)
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菅原聡,松村正清: "Atomic Layer Epitaxy of Germanicem" Applied Surface Science. 82/83. 380-386 (1994)
Satoshi Sukawara,Masakiyo Matsumura:“Germanicem 的原子层外延”应用表面科学 82/83(1994)。
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今井茂他: "Atomic Layer Epitaxy of Germanium using Atomic Hydrogen" Abstracts of Electronic Material Conf.52 (1993)
Shigeru Imai 等人:“使用原子氢进行锗的原子层外延”电子材料会议摘要 52 (1993)
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S.Imai et.al.: "Atomic Layr Etching of Silicon Using Thermal Desorption Method" Japan Journal Applied Physics. (Submitted).
S.Imai 等人:“使用热脱附法的硅原子层蚀刻”日本应用物理学杂志。
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S.Morishita et.al.: "New Substances for Atomic Layr CVD of Silicon Dioxide" Thin Solid Films. (Submitted).
S.Morishita 等人:“二氧化硅原子层 CVD 的新物质”固体薄膜。
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共 30 条
Study of Si/Ge Strain-Controlled Atomic-Laver Super-Lattices
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批准号:10305003
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项目类别:Grant-in-Aid for Scientific Research (A).
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资助金额:$25.28万
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财政年份:1998
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负责人:MATSUMURA Masakiyo
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依托单位:
Study of basic technology for System-on-Glass
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批准号:09555109
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$7.74万
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财政年份:1997
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负责人:MATSUMURA Masakiyo
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依托单位:
Preparation and Characterization of Si-based Manmade Crystals
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批准号:07405001
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$17.92万
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财政年份:1995
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负责人:MATSUMURA Masakiyo
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依托单位:
Atomic-Layr-Epitaxy of Group VI Semiconductors Using Ultra-Activ Gas
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批准号:04452171
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$4.42万
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财政年份:1992
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负责人:MATSUMURA Masakiyo
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依托单位:
Investigation of Behaviours of Electrons in Ultra-thin Amorphous Silicon Layer and their Device Applications
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批准号:60460061
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项目类别:Grant-in-Aid for General Scientific Research (B)
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资助金额:$4.93万
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财政年份:1985
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负责人:MATSUMURA Masakiyo
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依托单位:
Fabrication of High-Speed Amorphous-Silicon Integrated Circuits
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批准号:59850062
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项目类别:Grant-in-Aid for Developmental Scientific Research
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资助金额:$4.54万
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财政年份:1984
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负责人:MATSUMURA Masakiyo
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依托单位:
海外基金