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Thin-Film-Transistor and Its Layr-Structured Circuitry for Signal Prosessing Based on Probability

基于概率的薄膜晶体管及其层状信号处理电路

基本信息

批准号：
08650406
负责人：
ASANO Tanemasa
金额：
$ 1.47万
依托单位：
Kyusyu Institute of Technology
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
1996
资助国家：
日本
起止时间：
1996 至 1997
项目状态：
已结题

项目摘要

Thin-film-transistor tenhnology has investigated from the view points of material preparation and device structures. Thin films of polycrystaline silicon and field effect transistors have been investigated.・In order to enhance the signal processing speed of thin-film-transistor cricuits, it is desirable to design and fabricate each transistor in a circuit in a single polycrystalline grain. In order to realize this ideal situation, it is necessary to control the position of crystal and the growth speed of the crystal grains. We have found (1) enhancement of nucleation rate of amorphous silicon, and (2) reduction of the grain growth rate by irradiation of amorphous silicon with ions of innert species. Using these phenomena, we have demonstarated the control of crystallization sites of polycrystalline silicon films.・Thin-films transistors fabricated on the polycrystalline silicon film prepared using the above nucleation-controlled method have been verified to show about 3 times higher operation speed than those fabricated using the conventional method.・It has been demonstrated that, using the nucleation control method, thin-film transistors can be shrinked down to 0.6 mum and circuits composed of these transistors can operate. A test oscilation circuit has been designed and fabricated, which operated at the frequency range of several MHz at supply voltage of 5 V.Application of field programmable analog and digital ICs to implementation of pulse signal processing circuits has been investigated.・It has been found that analog/digital mixed signal circuits can be realized by converting analog signals to digitl signals in field progarammable analog arrays (FPAAs) and jointing with field programmable gate arrays (FPGAs).・Using FPAA and FPGA,voltage controlled oscilator, ADC,DAC,and countors has been implemented and impletation method has been established.

从材料制备和器件结构的角度对薄膜晶体管技术进行了研究。对多晶硅薄膜和场效应晶体管进行了研究。为了提高薄膜晶体管电路的信号处理速度，希望在单个多晶颗粒中设计和制造电路中的每个晶体管。为了实现这一理想状态，有必要控制晶体的位置和晶粒的生长速度。我们发现(1)非晶态硅的成核速率提高，(2)非晶态硅的内相离子辐照可降低晶粒生长速率。利用这些现象，我们证明了多晶硅薄膜结晶位置的控制。使用上述成核控制方法制备的多晶硅薄膜上制备的薄膜晶体管已被验证，其运行速度比使用传统方法制备的晶体管高约3倍。·已经证明，使用成核控制方法，薄膜晶体管可以缩小到0.6 μ m，并且由这些晶体管组成的电路可以工作。设计并制作了一个测试振荡电路，在5v电源电压下工作在数MHz频率范围内。研究了现场可编程模拟和数字集成电路在脉冲信号处理电路中的应用。·已经发现，通过将现场可编程模拟阵列（FPAAs）中的模拟信号转换为数字信号，并与现场可编程门阵列（fpga）连接，可以实现模拟/数字混合信号电路。·利用FPAA和FPGA实现了压控振荡器、ADC、DAC和计数器，并建立了实现方法。