Science and technology of glass nanoimprint and its industrial applications

玻璃纳米压印科学技术及其工业应用

• 批准号: 17360320
• 负责人: YOSHIMOTO Mamoru
• 金额: $ 7.85万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2005
• 资助国家: 日本
• 起止时间: 2005 至 2007
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360320/
• 关键词: glass; nano-imprint; surface; oxide; nano-structure; nano-pattern; crystal growth; epitaxial film; 薄膜; 機能改質; 構造; ナノテクノロジー

We investigated atomic-scale surface modifications of silicate glass by nanoimprint using an atomically stepped sapphire (α-Al_2O_3 single crystal) plate as nanopattern mold. The sapphire mold had regularly arranged straight atomic steps, with uniform height and terrace width of about 0.2 and 80 nm, respectively. During pressing, vertical positions of the sapphire mold and glass plate significantly affected the morphology of the imprinted glass surface. The nanopattern was transferred to the glass surface when the mold was set on the glass plate, while the nanowave pattern was formed on the glass surface when the glass plate was set on the mold. The Vickers hardness of the nanostriped glass was estimated to be higher than that of non-patterned glass, and the surface of the nanostriped glass was more hydrophobic than that of non-patterned glass. We fabricated indium tin oxide (ITO) thin films on nanoimprinted glass substrates using pulsed laser deposition (PLD). The surface of the ITO thin films well reflected the nanopattern of the glass substrate surface. The degree of crystalline orientation of the ITO thin films fabricated on the nanoimprinted glasses was more intense than that of the ITO thin films on the non-patterned commercial glass substrates. The resistivity of the ITO thin films deposited on the nanoimprinted glasses was lower by about 30% than that on the non-patterned commercial glasses, which was probably due to the higher crystal orientation of the films on the nanopatterned glass surfaces.

采用纳米压印技术，以具有原子级台阶的蓝宝石（α-Al_2O_3单晶）为模板，对硅酸盐玻璃进行了原子级表面修饰。蓝宝石模具具有规则排列的直原子台阶，具有分别约0.2和80 nm的均匀高度和平台宽度。在压制过程中，蓝宝石模具和玻璃板的垂直位置显著影响压印玻璃表面的形态。当将模具设置在玻璃板上时，纳米图案被转移到玻璃表面，而当将玻璃板设置在模具上时，在玻璃表面上形成波纹图案。纳米条纹玻璃的维氏硬度被估计为高于非图案化玻璃的维氏硬度，并且纳米条纹玻璃的表面比非图案化玻璃的表面更疏水。采用脉冲激光沉积法在纳米压印玻璃基底上制备了氧化铟锡薄膜。ITO薄膜的表面很好地反映了玻璃基板表面的纳米图案。在纳米压印玻璃上制备的ITO薄膜的结晶取向度比在非图案化商业玻璃基板上制备的ITO薄膜的结晶取向度更强烈。沉积在纳米压印玻璃上的ITO薄膜的电阻率比未图案化的商业玻璃低约30%，这可能是由于纳米图案化玻璃表面上的膜的较高晶体取向。

项目成果

Control of Nano-Step Structures on Sapphire Wafer Surface by Focused Ion Beam Processing

• DOI: 10.2109/jcersj.113.478
• 发表时间: 2005
• 期刊: Journal of the Ceramic Society of Japan
• 影响因子: 1.1
• 作者: Atsuko Takeuchi;T. Kotaki;K. Koyama;K. Sunakawa;Y. Yaguchi;Yoshinori Matsui;M. Murasugi;S. Seki;S. Tagawa;W. Hara;M. Yoshimoto

Nanoscale growth control of functional thin films on atomically surface- controlled substrates by laser MBE

利用激光 MBE 对原子表面控制基底上的功能薄膜进行纳米级生长控制

• 发表时间: 2008
• 期刊: Proc. of SPIE Vol. 6879
• 作者: W. Hara;M. Yoshimoto
• 通讯作者: M. Yoshimoto

Formation of a nanogroove-striped NiO surface using atomic steps

使用原子步骤形成纳米凹槽条纹 NiO 表面

• 发表时间: 2006
• 期刊: Nanotechnology 17
• 作者: S. Akiba;A. Matsuda;H. Isa;M. Kasahara;S. Sato;T. Watanabe. W. Hara;M. Yoshimoto
• 通讯作者: M. Yoshimoto

Nanostripe Patterning of Glass Surface by Nanoimprint Using Self-organized Oxide Mold

使用自组织氧化物模具通过纳米压印在玻璃表面形成纳米条纹图案

• 发表时间: 2009
• 期刊: Materials Science and、Engineering B (in press)
• 作者: Y. Akita;Y. Kato;M. Hosaka;Y. Ono. S. Suzuki;A. Nakaiima;M. Yoshimoto
• 通讯作者: M. Yoshimoto

Transformation from an atomically stepped NiO thin film to a nanotape structure : A kinetic study using x-ray diffraction

从原子级 NiO 薄膜到纳米带结构的转变：使用 X 射线衍射的动力学研究

• 发表时间: 2008
• 期刊: Appl. Phys. Lett. Vol. 93
• 作者: O. Sakata;J. M. Soon;A. Matsuda;Y. Akita;M. Yoshimoto
• 通讯作者: M. Yoshimoto