Science and technology of glass nanoimprint and its industrial applications

采用原子阶梯蓝宝石（α-Al_2O_3单晶）板作为纳米图案模具，研究了纳米压印技术在硅酸玻璃表面的原子修饰。蓝宝石模具具有规则排列的直原子台阶，其高度和台阶宽度分别为0.2 nm和80 nm左右。在压制过程中，蓝宝石模具和玻璃板的垂直位置显著影响压印玻璃表面的形貌。当模具设置在玻璃板上时，纳米图案转移到玻璃表面，而当玻璃板设置在模具上时，纳米波图案在玻璃表面形成。结果表明，纳米条纹玻璃的维氏硬度高于非压花玻璃，且纳米条纹玻璃表面的疏水性优于非压花玻璃。利用脉冲激光沉积技术在纳米印迹玻璃衬底上制备了氧化铟锡（ITO）薄膜。ITO薄膜的表面很好地反映了玻璃基板表面的纳米图案。在纳米印迹玻璃上制备的ITO薄膜的结晶取向程度比在非图像化商业玻璃基板上制备的ITO薄膜更强。沉积在纳米印迹玻璃表面的ITO薄膜的电阻率比非图像化商业玻璃表面的ITO薄膜的电阻率低约30%，这可能是由于纳米印迹玻璃表面的薄膜具有更高的晶体取向。

We investigated atomic-scale surface modifications of silicate glass by nanoimprint using an atomically stepped sapphire (α-Al_2O_3 single crystal) plate as nanopattern mold. The sapphire mold had regularly arranged straight atomic steps, with uniform height and terrace width of about 0.2 and 80 nm, respectively. During pressing, vertical positions of the sapphire mold and glass plate significantly affected the morphology of the imprinted glass surface. The nanopattern was transferred to the glass surface when the mold was set on the glass plate, while the nanowave pattern was formed on the glass surface when the glass plate was set on the mold. The Vickers hardness of the nanostriped glass was estimated to be higher than that of non-patterned glass, and the surface of the nanostriped glass was more hydrophobic than that of non-patterned glass. We fabricated indium tin oxide (ITO) thin films on nanoimprinted glass substrates using pulsed laser deposition (PLD). The surface of the ITO thin films well reflected the nanopattern of the glass substrate surface. The degree of crystalline orientation of the ITO thin films fabricated on the nanoimprinted glasses was more intense than that of the ITO thin films on the non-patterned commercial glass substrates. The resistivity of the ITO thin films deposited on the nanoimprinted glasses was lower by about 30% than that on the non-patterned commercial glasses, which was probably due to the higher crystal orientation of the films on the nanopatterned glass surfaces.