Epitaxial Growth of Diamond Thin Films on Large-scale Smooth Sapphire Substrate

大尺寸光滑蓝宝石衬底上外延生长金刚石薄膜

• 批准号: 11450118
• 负责人: YOSHIMOTO Mamoru
• 金额: $ 4.03万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11450118/
• 关键词: sapphire substrate; diamond; thin film; ultrasmooth; laser ablation; graphite; epitaxial film; crystal growth; 超平垣

We propose a new method for the synthesis of diamond films via a hydrogen-free vapor phase route of pulsed laser ablation of a graphite target in a low-pressure pure oxygen atmosphere. The evidence from microscopic, diffraction and spectroscopic techniques indicates that high-quality diamond crystals can be nucleated and grown epitaxially on sapphire (single-crystal aluminum oxide) substrates without diamond-powder treatment at the temperatures lower than 600℃ under the optimized growth conditions of oxygen pressures and pulsed KrF-excimer laser ablation. The spectroscopic property of a laser plasma plume produced during pulsed laser ablation of graphite in an oxygen gas was examined by using the time-resolved optical emission measurements in order to discuss the vapor phase reaction and film growth mechanism.

本文提出了一种在低压纯氧气氛中，通过无氢气相脉冲激光烧蚀石墨靶合成金刚石薄膜的新方法。显微镜、衍射和光谱技术的证据表明，在氧压和脉冲KrF准分子激光烧蚀的优化生长条件下，在低于600℃的温度下，无需金刚石粉末处理，即可在蓝宝石（单晶氧化铝）衬底上成核并外延生长出高质量的金刚石晶体。利用时间分辨光发射技术研究了脉冲激光烧蚀石墨时产生的等离子体羽流的光谱特性，探讨了气相反应和薄膜生长机理。

项目成果

M.Yoshimoto,K.Yoshida,H.Marata,M.kakihana et al.: "Epitaxial Diamond Growth on Sapphire in an Oxydizing Environments"Nature. 398. 340-342 (1999)

M.Yoshimoto、K.Yoshida、H.Marata、M.kakihana 等人：“氧化环境中蓝宝石上的外延金刚石生长”自然。

Epitaxial Diamond Growth on Sapphire in Oxydizing Environment

氧化环境中蓝宝石上的外延金刚石生长

• 发表时间: 2007
• 期刊: Nature 399
• 作者: M.Yoshimoto;K.Yoshida;H.Maruta;Y.Hishitani;S.Hishino;M.Takiha
• 通讯作者: M.Takiha

Kubo, Kurokawa, Inaba, Suzuki, takami, Miyamoto, Kawasaki, Yoshimoto, Koinuma: "Atomic Crystal Growth Simulation of Metal Oxide Materials"Trans. of Mater. Res. Soc. Japan. 26(3). 989-992 (2001)

Kubo、Kurokawa、Inaba、Suzuki、takami、Miyamoto、Kawasaki、Yoshimoto、Koinuma：《金属氧化物材料的原子晶体生长模拟》译。

Nakajima, M.Furusawa, Sasaki, Yoshimoto: "Optical emission study of laser ablation plasma plume for the preparation of diamond films in oxygen"Transaction of the Mater. Res. Soc. Japan. 26(3). 1021-1024 (2001)

Nakajima、M.Furusawa、Sasaki、Yoshimoto：“激光烧蚀等离子体羽流的光学发射研究，用于在氧气中制备金刚石薄膜”，Transaction of the Mater。

Epitaxial diamond growth on sapphire in an oxidizing environment

• DOI: 10.1038/20653
• 发表时间: 1999-05
• 期刊: Nature
• 影响因子: 64.8
• 作者: M. Yoshimoto;Kenji Yoshida;H. Maruta;Yoshiko Hishitani;H. Koinuma;S. Nishio;M. Kakihana;T. Tachibana