Epitaxial Growth of Diamond Thin Films on Large-scale Smooth Sapphire Substrate

大尺寸光滑蓝宝石衬底上外延生长金刚石薄膜

• 批准号: 11450118
• 负责人: YOSHIMOTO Mamoru
• 金额: $ 4.03万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1999
• 资助国家: 日本
• 起止时间: 1999 至 2001
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-11450118/
• 关键词: sapphire substrate; diamond; thin film; ultrasmooth; laser ablation; graphite; epitaxial film; crystal growth; 超平垣

We propose a new method for the synthesis of diamond films via a hydrogen-free vapor phase route of pulsed laser ablation of a graphite target in a low-pressure pure oxygen atmosphere. The evidence from microscopic, diffraction and spectroscopic techniques indicates that high-quality diamond crystals can be nucleated and grown epitaxially on sapphire (single-crystal aluminum oxide) substrates without diamond-powder treatment at the temperatures lower than 600℃ under the optimized growth conditions of oxygen pressures and pulsed KrF-excimer laser ablation. The spectroscopic property of a laser plasma plume produced during pulsed laser ablation of graphite in an oxygen gas was examined by using the time-resolved optical emission measurements in order to discuss the vapor phase reaction and film growth mechanism.

我们提出了一种新方法，用于通过在低压纯氧气中的石墨靶脉冲激光消融的无氢蒸气相途径合成钻石膜。 The evidence from microscopic, diffraction and spectroscopic techniques indicate that high-quality diamond crystals can be nuclearized and grown epitaxially on sapphire (single-crystal aluminum oxide) substrates without diamond-powder treatment at the temperatures lower than 600℃ Under the optimized growth conditions of oxygen pressures and pulsed KrF-excimer laser ablation.通过使用时间分辨的光学发射测量测量，检查了在氧气中脉冲激光消融过程中产生的激光等离子体的光谱特性，以讨论蒸气相反应和膜生长机制。

项目成果

Epitaxial Diamond Growth on Sapphire in Oxydizing Environment

氧化环境中蓝宝石上的外延金刚石生长

• 发表时间: 2007
• 期刊: Nature 399
• 作者: M.Yoshimoto;K.Yoshida;H.Maruta;Y.Hishitani;S.Hishino;M.Takiha
• 通讯作者: M.Takiha

M.Yoshimoto,K.Yoshida,H.Marata,M.kakihana et al.: "Epitaxial Diamond Growth on Sapphire in an Oxydizing Environments"Nature. 398. 340-342 (1999)

M.Yoshimoto、K.Yoshida、H.Marata、M.kakihana 等人：“氧化环境中蓝宝石上的外延金刚石生长”自然。

Epitaxial diamond growth on sapphire in an oxidizing environment

• DOI: 10.1038/20653
• 发表时间: 1999-05
• 期刊: Nature
• 影响因子: 64.8
• 作者: M. Yoshimoto;Kenji Yoshida;H. Maruta;Yoshiko Hishitani;H. Koinuma;S. Nishio;M. Kakihana;T. Tachibana

Kubo, Kurokawa, Inaba, Suzuki, takami, Miyamoto, Kawasaki, Yoshimoto, Koinuma: "Atomic Crystal Growth Simulation of Metal Oxide Materials"Trans. of Mater. Res. Soc. Japan. 26(3). 989-992 (2001)

Kubo、Kurokawa、Inaba、Suzuki、takami、Miyamoto、Kawasaki、Yoshimoto、Koinuma：《金属氧化物材料的原子晶体生长模拟》译。

Nakajima, M.Furusawa, Sasaki, Yoshimoto: "Optical emission study of laser ablation plasma plume for the preparation of diamond films in oxygen"Transaction of the Mater. Res. Soc. Japan. 26(3). 1021-1024 (2001)

Nakajima、M.Furusawa、Sasaki、Yoshimoto：“激光烧蚀等离子体羽流的光学发射研究，用于在氧气中制备金刚石薄膜”，Transaction of the Mater。