InP-based membrane-type optical and electronic devices for broad band intra-chip/inter-chip interconnection in Si-LSI circuits

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We investigated InP-based membrane-type optical and electronic devices for broad band and low-power consumption optical interconnection in Si-LSI circuits since the RC delay time and the power consumption in metal wires will be bottleneck of high-speed operation and high functionality of LSIs in future. As the results, we successfully demonstrated current-injection-type membrane semiconductor lasers as well as photodetectors as low-power consumption optical devices, and also terahertz devices for inter-chip high-speed interconnection.