Untra-compact photodetector based on plasmonic waveguide for optical wiring

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Ultra-compact and high-speed waveguide type photodetector and optical modulator by introducing the concept of plasmonics into conventional semiconductor optical devices have been investigated for on-chip optical wiring.As for the photodetector using plasmonic waveguide, the coupling efficiency to 500-nm wide waveguide and the propagation loss were calculated by FEM (finite element method) analysis and the device structure was fabricated. As for the electro-absorption type plasmonic modulator, a mode analysis combining carrier density and FEM revealed that the moulation efficiency was 4.5 dB/ micronmeter which corresponds to 2-3 times better value than that previously reported for plasmonic modulators.