Fabrication Process Improvement of Multi-channel Optical MEMS Switch Using a Belt-shaped Thin Film Mirror

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This paper describes fabrication process improvement of a multi-channel optical MEMS switch using a belt-shaped thin film mirror. This switch has advantages of simple structure and no wear. However its suitable fabrication process is not clarified yet and the prototype switches were manually assembled. In this paper, the suitable fabrication process was discussed and the effects of the fabrication process improvement on the switching accuracy and the driving voltage were examined. The optical switch made through the improved fabrication process controlled the spot position more accurately than the previous switches. In addition, the minimum driving voltage of the switch reduced. These experimental results quicken the realization of the multi-channel optical MEMS switch using a belt-shaped thin film mirror.