Interface structures and bonding strength between metallic glass thin films and substrates towards MEMS applications.

面向 MEMS 应用的金属玻璃薄膜和基板之间的界面结构和结合强度。

• 批准号: 22760552
• 负责人: LIU Yanhui
• 金额: $ 2.66万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760552/
• 关键词: 金属ガラス; 薄膜; MEMS

With the financial support, the parameters that affect the growth and bonding film are found, which are very helpful for the fabrication of MEMS devices and processing of the metallic glass films. The mechanical properties of the films are characterized by using nanoindentation. By employing the atomic force microscopy, the metallic glass is revealed to be inhomogeneous on scale of ~ 2. 5 nm, which is consistent with many glass models and theories.

在资金支持下，找出了影响金属玻璃薄膜生长和键合的工艺参数，对MEMS器件的制备和金属玻璃薄膜的加工有很大的帮助。采用纳米压痕技术对薄膜的力学性能进行了表征。利用原子力显微镜观察到金属玻璃在~2.5 nm尺度上是不均匀的，这与许多玻璃模型和理论是一致的。

项目成果

Characterization of Nanoscale Mechanical Heterogeneity in a Metallic Glass by Dynamic Force Microscopy

• DOI: 10.1103/physrevlett.106.125504
• 发表时间: 2011-03-23
• 期刊: PHYSICAL REVIEW LETTERS
• 影响因子: 8.6
• 作者: Liu, Y. H.;Wang, D.;Chen, M. W.
• 通讯作者: Chen, M. W.

Experimental Characterization of Nanoscale Mechanical Heterogeneity in a Metallic Glass by Dynamic Force Microscopy

通过动态力显微镜对金属玻璃中纳米级机械异质性进行实验表征

• 发表时间: 2011
• 期刊: Phys. Rev. Lett.
• 作者: Y. H. Liu;D. Wang;K. Nakajima;W. Zhang;A. Hirata;T. Nishi;A. Inoue;M. W. Chen
• 通讯作者: M. W. Chen

Deposition of multicomponent metallic glass films by single-target magnetron sputtering

• DOI: 10.1016/j.intermet.2011.10.007
• 发表时间: 2012-02-01
• 期刊: INTERMETALLICS
• 影响因子: 4.4
• 作者: Liu, Y. H.;Fujita, T.;Chen, M. W.
• 通讯作者: Chen, M. W.