Radiation test of SOI detector for the particle physics experiment Belle2

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We had achieved various radiation tests with the semi-conductor radiation detector with Silicon On Insulator(SOI) technology. In 2010, we performed X-ray irradiation test on the various kinds of SOI MOSFETs. In this test, we found the BPW(Buried P-Well) underneath the SiO2 insulator helps to increase radiation tolerance. In the same year, we succeeded first tracking of positron beam at the Research Center for Electron and Photon Science of Tohoku University with SOI detector which consists of 3 layers. In 2011, we also succeeded tracking of 120 GeV hadron beam at CERN with updated SOI detector which consists of 4 layers. Using the data, we evaluated the SOI detector, intrinsic resolution and detection efficiency and so on.