Microstructure and Physical Properties of Magnetic Particles Embedded in Semiconductor AIN Films Having Highly Thermal Conductivity

本研究的目的是利用低成本的制备设备制备含磁性颗粒的纳米复合AlN薄膜，如Co、Fe和Fe-Co合金，并检测其微观结构和相关的物理性能。AlN是一种具有高导热系数和高耐化学性的半导体。主要研究结果如下：(1)在双靶直流溅射室中，通过改变溅射气体中Ar气体和氮气的组成比，可以很容易地制备出成分范围内含有GO、Fe和Fe-Co颗粒的AlN薄膜。详细分析了退火态和沉积态薄膜的微观结构和包括电阻率在内的磁性能，并对它们的特点进行了比较。(2)当氮气和Ar的气体比例较大时，脱位的薄膜比在较小的气体比例下制备的薄膜更具非晶态，并且…More在热处理过程中表现出不同的结晶行为。在较高气体比例下沉积的AlN薄膜完全不呈现柱状结构。(3)即使在较低的气体比例下使用Al-Co复合靶材，也没有观察到CoNx的形成。当使用Al-Fe靶材时，沉积的薄膜没有表现出任何磁性。这可能归因于新形成的AlFe化合物的制备，该化合物不具有磁性。但FeNx氮化铁在热处理后形成，并在高温下分解。两种薄膜在退火后的磁学性质和电阻率都发生了很大的变化，这归因于薄膜微结构的变化。(4)Al靶和FeCo靶均用于制备纳米复合薄膜，且大部分薄膜是在400℃左右从衬底上形成的。C，这是由于用FeCo靶制备的薄膜发生了剧烈的分解过程，分解成Co相和FeN相。(5)对Co-C薄膜的动态硬度测量进行了初步的研究，发现DHT115的测量结果可用于估算薄膜中的金属成分。这一结果表明，在对Co-C薄膜进行改进后，该方法将能够估计含有磁性颗粒的AlN薄膜的金属成分。较少

The purpose of this study is to fabricate nanocomposite AlN films containing magnetic particles, such as Co, Fe, and Fe-Co alloys by the use of a low-cost preparation apparatus, and to examine their microstructure and relevant physical properties. AlN is a semiconductor which has highly thermal conductivity and highly chemical resistance. The main results are as follows : (1) By changing the composition ratio of argon gas to nitrogen gas as sputtering gas in a two-facing-target dc sputtering chamber, it was easy to fabricate AlN films which contain Go, Fe, and Fe-Co particles in a desired range of composition. Their microstructure and magnetic properties including electrical resistivity were examined for the annealed films as well as as-deposited films in detail, and their characteristics were summarized in comparison with each other. (2) When the gas ratio of nitrogent to argon is large, as-depsosited films appear more amorphous-like than the films prepared at the small gas ratio, and … More showed different behavior of crystalization during annealing. As-deposite AlN films do not exhibit collumnar structure at all for the films prepared at higher gas ratios. (3) The formation of CoNx was not seen for the films even when the Al-Co comosite targets were used at lower gas ratios. When Al-Fe target was used, as-deposited films did not show any magnetic properties. This may be ascribed to the fabrication of a newly formed AlFe compound which does not exhibit magnetic property. But FeNx iron-nitrides were formed after annealing and decomposed at elevated temperatures. For both films after annealing, we can observe a drastic change in magnetic property as well as electrical resistivity, and this was ascribed to the changes in microstructure in the films. (4) Both Al target and FeCo target were used for the formation of nanocomposite films, and most of the films were pilled out from the substrates at around 400 。C, and this was ascribe to the decomposition process of the films into Co phase and FeN phase which took place drastically for the films prepared by using FeCo target. (5) A fundamental study concerning the measurement of dynamic hardness was performed preliminarily for the Co-C films, It was found that the measurements of DHT115 are available for estimation of metal composition in the films. This result suggests that this method will be able to estimate the metal composition of AlN films containing magnetic particles after some improvements according to the previous results for the Co-C films. Less