Electrical contact engineering for next generation semiconductor devices
Electrical contact engineering for next generation semiconductor devices
批准号:
LP190100010
负责人:
Prof Robert Elliman
金额:
$21.79万
依托单位国家:
澳大利亚
项目类别:
Linkage Projects
财政年份:
2021
资助国家:
澳大利亚
项目状态:
已结题
起止时间:
2021-01-01 至 2023-12-31
中文摘要
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英文摘要
Contact resistivity and parasitic resistance have been identified as limiting factors in the performance of next-generation semiconductor devices. This project aims to understand these limitations and to develop methods to mitigate them through the application of advanced ion implantation processing. Specifically, this will involve: investigating the effect of selective doping on electrical properties of metal-semiconductor interfaces; determining how ultra-shallow dopant profiles are affected by device structure and processing; and developing improved methods for measuring ultra-low contact resistivity. The research will be undertaken as a collaboration between researchers at the Australian National University and Applied Materials Ltd.
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Ion-beam synthesis of functional oxides for next generation memory devices
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批准号:LP150100693
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项目类别:Linkage Projects
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资助金额:$28.52万
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财政年份:2016
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负责人:Prof Robert Elliman
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依托单位:
Controlling the forming and switching characteristics of non-volatile resistive memory devices using ion-implantation
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批准号:LP120100272
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项目类别:Linkage Projects
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资助金额:$24.02万
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财政年份:2012
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负责人:Prof Robert Elliman
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依托单位:
Understanding and improving resistive-switching in hafnium-oxide-based high-k dielectrics for non-volatile memory applications
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批准号:DP120101101
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项目类别:Discovery Projects
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资助金额:$21.52万
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财政年份:2012
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负责人:Prof Robert Elliman
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依托单位:
Switching mechanisms in nonvolatile resistive memory using high-k dielectrics
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批准号:LP0989488
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项目类别:Linkage Projects
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资助金额:$13.75万
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财政年份:2009
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负责人:Prof Robert Elliman
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依托单位:
Charge transport and trapping in high-k dielectric films containing self-assembled nanocrystals
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批准号:DP0878086
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项目类别:Discovery Projects
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资助金额:$27.62万
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财政年份:2008
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负责人:Prof Robert Elliman
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依托单位:
Improved understanding of nanoscale materials - structure, composition, crystallography and defects revealed by electron imaging and analysis at high spatial resolution
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批准号:LE0775729
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项目类别:Linkage Infrastructure, Equipment and Facilities
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资助金额:$28.01万
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财政年份:2007
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负责人:Prof Robert Elliman
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依托单位:
Self-assembled semiconductor nanocrystals as functional materials for microelectronics, optoelectronics and photonics
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批准号:DP0771158
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项目类别:Discovery Projects
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资助金额:$21.85万
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财政年份:2007
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负责人:Prof Robert Elliman
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依托单位:
Implant Isolation of III-V Compound Semiconductor Devices and Structures
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批准号:LP0561927
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项目类别:Linkage Projects
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资助金额:$14.57万
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财政年份:2005
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负责人:Prof Robert Elliman
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依托单位:
The Physical and Optical Properties of Self-Assembled Si Nanocrystals
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批准号:DP0343279
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项目类别:Discovery Projects
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资助金额:$23.34万
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财政年份:2003
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负责人:Prof Robert Elliman
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依托单位:
Novel Silicon-Based Photonic Devices
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批准号:DP0343308
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项目类别:Discovery Projects
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资助金额:$20.24万
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财政年份:2003
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负责人:Prof Robert Elliman
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依托单位:
国内基金
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