Nonlinear micro-electro-mechanical sensors and actuators

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This research program is focused on the development of Micro-Electro-Mechanical Systems (MEMS) for energy harvesting, sensing, and actuation. MEMS offer a mature and cost-effective fabrication technology with the potential to innovate micro-machines that can outperform their macro equivalents and perform new functions. Our goal is to turn this potential into reality by meeting a set of three goals. 1) Realizing innovative micro-power generators (MPG) to meet mobile power needs: (a) We will build on our demonstrated wideband electromagnetic MPGS to design and realize an electrostatic version. (b) We will demonstrate and optimize low-frequency MPGs that can harvest electric energy efficiently at frequencies below 10Hz. We will use a suspension systems made from linear guides rather than springs. (c) We will analyze, design, and demonstrate low-power rectification circuits. 2) Realizing static and a dynamic versions of a binary mass sensor: This sensor does not seek to quantify the amount of added mass, rather it detects whether the added mass is larger or smaller than a threshold (safe) amount. The output will be a binary, 0 or 1, detection signal. 3) Demonstrating a stable deployable electrostatic actuator with a range of 90% of the capacitive gap: We have realized a version of the actuator that uses a vibrometer as a sensor. We seek to develop a single-chip version where the motions of the micro-actuator are detected via on board piezo-resistor and controlled via onbaord close loop circuits. Wideband MPGs offer a better match to the normally unpredictable environments, and thereby harvest more electric energy, than commercially deployed MPGs. Low-frequency MPGs can harvest power efficiently below 10Hz. This is the only form vibration energy available in environments such as homes and offices. Cheap and small micro-mass sensors will allow us to develop inertial gas and biological sensors to detect polluting gases, such as CO, SOx, and NOx, and biological organisms, such as the E Coli bacterium.