Microfabrication of RF-MEMS devices using synchrotron x-ray lithography

使用同步加速器 X 射线光刻技术微加工 RF-MEMS 器件

• 批准号: 216835-2007
• 负责人: Klymyshyn, David
• 金额: $ 1.44万
• 依托单位: University of Saskatchewan
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2011
• 资助国家: 加拿大
• 起止时间: 2011-01-01 至 2012-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=477794
• 关键词: Microfabrication; RF; MEMS; devices; using

Radio frequency (RF) wireless systems are constantly being pushed to higher frequencies, while continuing trends towards ever smaller, more power efficient, and cheaper wireless devices are severely challenging traditional technologies. RF micro-electro-mechanical-systems (RF MEMS) devices can offer improved isolation, lower power dissipation, and reduced size and weight, and are poised to replace conventional devices and even enable new circuit architectures in future wireless applications.

射频(RF)无线系统不断被推向更高的频率，而不断向更小、更节能和更便宜的无线设备发展的趋势正在严重挑战传统技术。射频微电子机械系统(RFMEMS)器件可以提供更好的隔离度、更低的功耗、更小的尺寸和重量，并有望在未来的无线应用中取代传统器件，甚至实现新的电路体系结构。