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Atomic layer deposition tool design, development, and testing

Atomic layer deposition tool design, development, and testing
原子层沉积工具设计、开发和测试
批准号:
488540-2015
负责人:
Barry, Sean
金额:
$1.82万
依托单位:
依托单位国家:
加拿大
项目类别:
Engage Grants Program
财政年份:
2015
资助国家:
加拿大
项目状态:
已结题
起止时间:
2015-01-01 至 2016-12-31

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中文摘要
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英文摘要
This project is a new collaboration between Angstrom Engineering in Kitchener, Ontario, and Professor Sean Barry of Carleton University in Ottawa, Ontario. Angstrom Engineering is a leader in the manufacturing of thin film deposition equipment used by researchers around the world to develop new technologies. Angstrom would like to develop a new tool for a process called Atomic Layer Deposition (ALD). ALD allows for the deposition of very thin films on the surface of different materials and has applications in microelectronics, medicine, and many others. Professor Barry is a top researcher in the field of ALD, and has decades of experience working with ALD tools. In this collaborative project, Dr. Barry and his team at Carleton will work with Angstrom Engineering to design, develop, and test a new tool for use in ALD research labs. This project will allow Angstrom to enter a new market of research tools, and become the first Canadian-based company to offer such a tool to clients worldwide.
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