Image-Based Control of Movement-Induced Vibration During High-Speed Operation of Scanning Probe Microscopes

本研究将解决限制扫描探针显微镜(SPM)工作速度的运动诱发振动这一关键问题。人们注意到，SPM是实验研究和操纵纳米(和亚纳米)现象的关键使能工具。然而，在SPM的高速运行过程中，运动引起的振动会导致样品和/或探头的损坏以及正在研究的表面性质的改变。因此，当前的SPM系统运行在低速；例如，高分辨率的SPM系统运行在最低谐振频率的约1/100处，该频率会在系统中激发显著的振动。因此，运动诱发的振动限制了当前SPM系统的运行速度。这项工作建议对运动引起的振动进行补偿，从而使SPM能够以亚纳米分辨率高速运行，而不会造成样品和探头损坏等不利影响。该方法的创新之处在于，它将利用SPM现有的成像能力来提高运算速度。提出的研究包括以下三个任务：(1)利用扫描隧道显微镜(SPM)图像测量动力学效应；(2)补偿SPM动力学；(3)使用扫描隧道显微镜(STM)评估操作速度的提高。所提出的方法将用于评估STM成像标准样品的最大速度，例如高度定向热解石墨(HOPG)中的碳原子。作为关键的赋能工具，扫描电子显微镜的拟议改进将对纳米科学和纳米技术的研究和开发产生广泛影响。拟议的工作还将建立在新兴纳米技术行业保持竞争力所需的研究和人力资源基础设施。

ABSTRACTThis research will address the critical problem of movement-induced vibration that limits the operating speed of Scanning Probe Microscopes (SPMs). It is noted that SPMs are key enabling tools in the experimental investigation and manipulation of nano scale (and sub-nano scale) phenomena. However, during high-speed operation of SPMs, movement-induced vibration leads to damage of the sample and/or probe as well as modification of the surface properties being investigated. Therefore, current SPM systems are operated at low speeds; for example, high-resolution SPM systems operate at around 1/100th of the lowest resonant frequency that excites significant vibrations in the system. Thus, movement-induced vibration limits the operating speed of current SPM systems. This work proposes to compensate-for the movement-induced vibration and, thereby, to enable high-speed operation of SPMs with sub-nanometer resolution, and without adverse affects such as sample and probe damage. The novelty of the proposed approach is that it will exploit the extant imaging capability of the SPM to increase the operating speed. The proposed research consists of following three tasks: (1) measure effects of dynamics using SPM images; (2) compensate-for the SPM dynamics; and (3) evaluate increase in operating speed using Scanning Tunneling Microscope (STM). The proposed approach will be used to evaluate the maximum speed at which a STM can image standard samples such as carbon atoms in highly oriented pyrolytic graphite (HOPG). The proposed improvements of SPM, a key-enabling tool, will have a broad impact on research and development in nanosciences and nanotechnologies. The proposed work will also build the research and human resource infrastructure needed to remain competitive in emerging nanotechnology industries.