Femtosecond Laser Processing of Glass: Fundamental Studies and Applications

本课题旨在研究超短脉冲激光诱导电介质材料加工的机理。该研究将对超短脉冲激光诱导电介质加工的基础研究产生影响。在微机械加工和微流体/光学诊断设备制造方面的重要应用将得到推进。本研究有四个主要目标：1)研究飞秒激光与介电材料（如玻璃）相互作用时的表面和体积损伤机制；2)与液体介质相比，研究玻璃内部超短激光脉冲诱导等离子体的产生及其时间演化；3)深入研究飞秒激光在介质上打孔的机理，包括在具有良好壁质量的介质上实现高效、高纵横比打孔；4)制造并测试一种混合3d玻璃微机械装置，该装置结合了通过波导和微流体歧管的光学检测。通过解析激光能量在透明材料中的沉积、超快激光脉冲的非线性传播、激发态载流子的产生、缺陷的形成、损伤、等离子体的形成和烧蚀，分析激光与材料的相互作用。这将通过利用先进的时间分辨诊断与详细的计算建模相协调的实验工作来实现。教育是这个项目的一个组成部分。两名研究生将接受先进材料加工、实验和理论建模方面的培训。未被充分代表的少数族裔学生将通过加州大学伯克利分校的GrAD和SUPERB项目受雇于该项目。研究成果将整合到一个教育活动网络中，旨在通过研究项目、实验和理论工作开发的演示和动画，向本科生、研究生和专业人士广泛传播。这项研究的结果也将整合到定期提供的激光加工和诊断研究生课程中。

This research program aims to study the mechanisms of ultra-short pulsed laser-induced processing of dielectric materials. The research will have an impact on the fundamental study of ultra-short pulsed laser-induced processing of dielectrics. Important applications in micromachining and fabrication of microfluidic/optical diagnostic devices will be advanced. The research has four main objectives: 1) to investigate the mechanisms of surface and volumetric damage in femtosecond-laser interactions with dielectric materials such as glasses; 2) to investigate generation and subsequent temporal evolution of ultra-short laser pulse-induced plasmas inside glasses as compared to liquid media; 3) to thoroughly investigate the mechanisms of femtosecond laser drilling of dielectrics, including demonstration of efficient, high-aspect ratio drilling in dielectrics with good wall quality; and 4) to fabricate and test a hybrid 3-D device micromachined in glass that combines optical detection via waveguides and microfluidic manifolds.The laser-materials interaction will be analyzed by resolving the laser energy deposition into the transparent material, the nonlinear propagation of the ultra-fast laser pulse, the generation of excited carriers, the defect formation, damage, plasma formation and ablation. This will be achieved by experimental work utilizing advanced time-resolved diagnostics in coordination with detailed computational modeling. Education constitutes an integral part of this project. Two graduate students will be trained in advanced materials processing, experimentation and theoretical modeling. Underrepresented minority students will be hired to work on the project through the UC Berkeley GrAD and SUPERB programs. The research results will be integrated into a web of educational activities aiming to achieve broad dissemination to undergraduate and graduate students and professionals through demonstrations and animations developed through the research programs experimental and theoretical work. The results of this research will also be integrated into a regularly offered graduate course on Laser Processing and Diagnostics.