Advanced atomic force microscopy using the FIRAT probe

目的与方法本研究的目的是开发用于原子力显微镜的新型探针和成像方法，以实现纳米尺度上的高速攻丝模式成像和定量材料表征。该方法是利用微加工和微尺度光学传感技术的最新发展来实现高性能探针结构。这些探针集成了静电驱动和光学干涉检测，提高了速度和检测灵敏度，消除了纳米级高速成像的几个瓶颈。技术优势：为了在保持干涉检测灵敏度的同时实现适合各种目标应用的大驱动范围（2-5um）探针，将研究基于衍射的新型光学结构。适合批量制造的实用探头设计，具有适当的动态和噪声-成像带宽在50-100kHz，热噪声水平在nN范围内？将被开发。最后，将设计和实现利用这些探针独特功能的控制系统和方法。更广泛的影响这项研究可以将原子力显微镜从研究实验室转移到工业平台，如内联半导体设备计量，以建立更快的计算机，并扩大其在基础科学应用中的应用。通过传播设备和技术诀窍，目标是在纳米技术和纳米科学方面迅速产生影响。除了K-12院校的教师和本科生参与研究项目外，长期目标是为每所高中提供易于操作，快速的原子力显微镜，为学生探索纳米尺度现象打开真正的窗口。

OBJECTIVE AND APPROACHThe objective of this research is to develop novel probes and imaging methods for atomic force microscopy to enable high speed tapping mode imaging and quantitative material characterization at the nanoscale. The approach is to take advantage of recent developments in microfabrication and microscale optical sensing technologies to implement high performance probe structures. These probes use integrated electrostatic actuation and optical interferometric detection for improved speed and detection sensitivity, eliminating several bottlenecks in high speed imaging at nanoscale. TECHNICAL MERITTo achieve probes large actuation range (2-5um) that is adequate for a variety of target applications while maintaining the interferometric detection sensitivity, novel diffraction based optical structures will be investigated. Practical probe designs suitable for batch fabrication and with proper dynamics and noise -- imaging bandwidths in the 50-100kHz, and thermal noise levels in the nN range ? will be developed. Finally, control systems and methods using the unique capabilities of these probes will be designed and implemented.BROADER IMPACTThis research can move the atomic force microscope from research labs to industrial platforms such as inline semiconductor device metrology to build faster computers, as well as broadening its use in basic science applications. Through dissemination of devices and know-how, a rapid impact in nanotechnology and nanoscience is targeted. In addition to involvement of teachers from K-12 institutions, and undergraduate students in the research project, the long term objective is to provide each high school with an easily operated, fast atomic force microscope, opening a real window for students to explore the nanoscale phenomena.